JPS5226159A - Wafer carrying method - Google Patents
Wafer carrying methodInfo
- Publication number
- JPS5226159A JPS5226159A JP10218375A JP10218375A JPS5226159A JP S5226159 A JPS5226159 A JP S5226159A JP 10218375 A JP10218375 A JP 10218375A JP 10218375 A JP10218375 A JP 10218375A JP S5226159 A JPS5226159 A JP S5226159A
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrying
- carrying method
- wafer surface
- spraying
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Manipulator (AREA)
Abstract
PURPOSE: Prevention of the adhesion of dry sludge on the wafer surface by spraying the detergent over the wafer surface under absorption carriage.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10218375A JPS5226159A (en) | 1975-08-25 | 1975-08-25 | Wafer carrying method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10218375A JPS5226159A (en) | 1975-08-25 | 1975-08-25 | Wafer carrying method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5226159A true JPS5226159A (en) | 1977-02-26 |
Family
ID=14320548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10218375A Pending JPS5226159A (en) | 1975-08-25 | 1975-08-25 | Wafer carrying method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226159A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5447483A (en) * | 1977-09-21 | 1979-04-14 | Hitachi Ltd | Holder of plate form objects |
JP2007329375A (en) * | 2006-06-09 | 2007-12-20 | Komatsu Machinery Corp | Holder for thin film article |
-
1975
- 1975-08-25 JP JP10218375A patent/JPS5226159A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5447483A (en) * | 1977-09-21 | 1979-04-14 | Hitachi Ltd | Holder of plate form objects |
JP2007329375A (en) * | 2006-06-09 | 2007-12-20 | Komatsu Machinery Corp | Holder for thin film article |
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