JPS5226159A - Wafer carrying method - Google Patents

Wafer carrying method

Info

Publication number
JPS5226159A
JPS5226159A JP10218375A JP10218375A JPS5226159A JP S5226159 A JPS5226159 A JP S5226159A JP 10218375 A JP10218375 A JP 10218375A JP 10218375 A JP10218375 A JP 10218375A JP S5226159 A JPS5226159 A JP S5226159A
Authority
JP
Japan
Prior art keywords
wafer carrying
carrying method
wafer surface
spraying
adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10218375A
Other languages
Japanese (ja)
Inventor
Susumu Komoriya
Tsutomu Mimata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10218375A priority Critical patent/JPS5226159A/en
Publication of JPS5226159A publication Critical patent/JPS5226159A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE: Prevention of the adhesion of dry sludge on the wafer surface by spraying the detergent over the wafer surface under absorption carriage.
COPYRIGHT: (C)1977,JPO&Japio
JP10218375A 1975-08-25 1975-08-25 Wafer carrying method Pending JPS5226159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10218375A JPS5226159A (en) 1975-08-25 1975-08-25 Wafer carrying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10218375A JPS5226159A (en) 1975-08-25 1975-08-25 Wafer carrying method

Publications (1)

Publication Number Publication Date
JPS5226159A true JPS5226159A (en) 1977-02-26

Family

ID=14320548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10218375A Pending JPS5226159A (en) 1975-08-25 1975-08-25 Wafer carrying method

Country Status (1)

Country Link
JP (1) JPS5226159A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5447483A (en) * 1977-09-21 1979-04-14 Hitachi Ltd Holder of plate form objects
JP2007329375A (en) * 2006-06-09 2007-12-20 Komatsu Machinery Corp Holder for thin film article

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5447483A (en) * 1977-09-21 1979-04-14 Hitachi Ltd Holder of plate form objects
JP2007329375A (en) * 2006-06-09 2007-12-20 Komatsu Machinery Corp Holder for thin film article

Similar Documents

Publication Publication Date Title
JPS5271871A (en) Washing apparatus
JPS5212576A (en) Wafer washing drying device
JPS52140179A (en) Vibrating conveyor
JPS5226159A (en) Wafer carrying method
JPS51130442A (en) A method for double-side coating
JPS525268A (en) Rotary coating device
JPS51144390A (en) Stable viscosity-increasing agents for inorganic acids
JPS525938A (en) Wooden door
JPS51114431A (en) Aqueous coating compositions
JPS53107545A (en) Surface hardening part for rolling contact
JPS5237941A (en) Self-propelling vehicle for peeling off paint from curved or plain sur face of large-scale tank, hull etc.
JPS51142795A (en) Grinding device
JPS51145544A (en) A method for applying liquid on a metal band
JPS5246025A (en) Spray drying process for alkylsulfate-containing compounds
JPS525269A (en) Rotary coating device
JPS526846A (en) Water turbine
JPS51119696A (en) Method for regeneration of the waste active carbon
JPS5368070A (en) Etching method
JPS5239572A (en) Equipment for ultrasonic washing of resin
JPS5212688A (en) Oil collecting material
JPS5212695A (en) Regenerating method of active carbon sheet
JPS5244601A (en) Method for treatment of surface of turn-table sheet etc.
JPS51140573A (en) Photo-resist coating device
JPS51136730A (en) Process for mod ifying water soluble paints
JPS51131167A (en) Device of soaking water on the floor surface