JPS5268886A - Surface treatment method of powder - Google Patents

Surface treatment method of powder

Info

Publication number
JPS5268886A
JPS5268886A JP14496775A JP14496775A JPS5268886A JP S5268886 A JPS5268886 A JP S5268886A JP 14496775 A JP14496775 A JP 14496775A JP 14496775 A JP14496775 A JP 14496775A JP S5268886 A JPS5268886 A JP S5268886A
Authority
JP
Japan
Prior art keywords
powder
surface treatment
treatment method
particles
contacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14496775A
Other languages
Japanese (ja)
Inventor
Toshio Tatsumi
Masayuki Tominaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14496775A priority Critical patent/JPS5268886A/en
Publication of JPS5268886A publication Critical patent/JPS5268886A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To efficiently form uniform thin films on the whole surfaces of fine particles to be surface treated by contacting the particles with reactive gases while stirring resulting from rotation of reaction tubes containing the particles of CVD apparatus.
COPYRIGHT: (C)1977,JPO&Japio
JP14496775A 1975-12-08 1975-12-08 Surface treatment method of powder Pending JPS5268886A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14496775A JPS5268886A (en) 1975-12-08 1975-12-08 Surface treatment method of powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14496775A JPS5268886A (en) 1975-12-08 1975-12-08 Surface treatment method of powder

Publications (1)

Publication Number Publication Date
JPS5268886A true JPS5268886A (en) 1977-06-08

Family

ID=15374344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14496775A Pending JPS5268886A (en) 1975-12-08 1975-12-08 Surface treatment method of powder

Country Status (1)

Country Link
JP (1) JPS5268886A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130059073A1 (en) * 2011-09-03 2013-03-07 Ying-Bing JIANG Apparatus and Method for making atomic layer deposition on fine powders
CN109689567A (en) * 2016-07-15 2019-04-26 1D材料有限责任公司 Silicon nanowires is prepared in carbon-based powder for the manufacturing equipment and method in battery

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130059073A1 (en) * 2011-09-03 2013-03-07 Ying-Bing JIANG Apparatus and Method for making atomic layer deposition on fine powders
US9951419B2 (en) * 2011-09-03 2018-04-24 Ying-Bing JIANG Apparatus and method for making atomic layer deposition on fine powders
CN109689567A (en) * 2016-07-15 2019-04-26 1D材料有限责任公司 Silicon nanowires is prepared in carbon-based powder for the manufacturing equipment and method in battery
JP2019527187A (en) * 2016-07-15 2019-09-26 ワンディー マテリアル エルエルシー Manufacturing apparatus and method for making silicon nanowires on carbon-based powder for use in batteries
CN109689567B (en) * 2016-07-15 2022-09-09 1D材料公司 Manufacturing apparatus and method for preparing silicon nanowires on carbon-based powder for use in battery
US11728477B2 (en) 2016-07-15 2023-08-15 Oned Material, Inc. Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries

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