Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Fujitsu Ltd
Original Assignee
Fujitsu Ltd
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Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP14496575ApriorityCriticalpatent/JPS5268884A/en
Publication of JPS5268884ApublicationCriticalpatent/JPS5268884A/en
PURPOSE: A novel method using CVD process by which charged fine particles are suspended in reactive gases by an external electric field to form uniform thin films on the whole surfaces.
COPYRIGHT: (C)1977,JPO&Japio
JP14496575A1975-12-081975-12-08Surfce treatment method of powder
PendingJPS5268884A
(en)