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Fujitsu Ltd
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Fujitsu Ltd
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Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP14496675ApriorityCriticalpatent/JPS5268885A/en
Publication of JPS5268885ApublicationCriticalpatent/JPS5268885A/en
PURPOSE: To efficiently form uniform thin films on the whole surfaces of fine particles to be surface treated by contacting the particles which trundle and fall in a spiral guide shoot with reactive gases in a reaction tube to CVD apparatus.
COPYRIGHT: (C)1977,JPO&Japio
JP14496675A1975-12-081975-12-08Surface treatment method of powder
PendingJPS5268885A
(en)