JPS51111482A - Sample table for surface treatment apparatus - Google Patents
Sample table for surface treatment apparatusInfo
- Publication number
- JPS51111482A JPS51111482A JP50035570A JP3557075A JPS51111482A JP S51111482 A JPS51111482 A JP S51111482A JP 50035570 A JP50035570 A JP 50035570A JP 3557075 A JP3557075 A JP 3557075A JP S51111482 A JPS51111482 A JP S51111482A
- Authority
- JP
- Japan
- Prior art keywords
- sample table
- surface treatment
- treatment apparatus
- sample
- correctly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Sample table, on which a number of samples can be set and transfer of the sample to the desired position can be made easily and correctly.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50035570A JPS51111482A (en) | 1975-03-26 | 1975-03-26 | Sample table for surface treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50035570A JPS51111482A (en) | 1975-03-26 | 1975-03-26 | Sample table for surface treatment apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51111482A true JPS51111482A (en) | 1976-10-01 |
Family
ID=12445404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50035570A Pending JPS51111482A (en) | 1975-03-26 | 1975-03-26 | Sample table for surface treatment apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51111482A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5855559A (en) * | 1981-09-25 | 1983-04-01 | Nisshin Haiboruteeji Kk | Ion implantation apparatus |
JPS6039162A (en) * | 1983-08-10 | 1985-02-28 | Anelva Corp | Vacuum apparatus for treating thin film |
WO1987001452A1 (en) * | 1985-08-29 | 1987-03-12 | Hitachi, Ltd. | Mass spectroscope |
-
1975
- 1975-03-26 JP JP50035570A patent/JPS51111482A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5855559A (en) * | 1981-09-25 | 1983-04-01 | Nisshin Haiboruteeji Kk | Ion implantation apparatus |
JPS6039162A (en) * | 1983-08-10 | 1985-02-28 | Anelva Corp | Vacuum apparatus for treating thin film |
JPH0215632B2 (en) * | 1983-08-10 | 1990-04-12 | Anelva Corp | |
WO1987001452A1 (en) * | 1985-08-29 | 1987-03-12 | Hitachi, Ltd. | Mass spectroscope |
US5083020A (en) * | 1985-08-29 | 1992-01-21 | Hitachi, Ltd. | Mass spectrometer |
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