JPS51111482A - Sample table for surface treatment apparatus - Google Patents

Sample table for surface treatment apparatus

Info

Publication number
JPS51111482A
JPS51111482A JP50035570A JP3557075A JPS51111482A JP S51111482 A JPS51111482 A JP S51111482A JP 50035570 A JP50035570 A JP 50035570A JP 3557075 A JP3557075 A JP 3557075A JP S51111482 A JPS51111482 A JP S51111482A
Authority
JP
Japan
Prior art keywords
sample table
surface treatment
treatment apparatus
sample
correctly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50035570A
Other languages
Japanese (ja)
Inventor
Susumu Kawase
Kazunobu Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50035570A priority Critical patent/JPS51111482A/en
Publication of JPS51111482A publication Critical patent/JPS51111482A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Sample table, on which a number of samples can be set and transfer of the sample to the desired position can be made easily and correctly.
COPYRIGHT: (C)1976,JPO&Japio
JP50035570A 1975-03-26 1975-03-26 Sample table for surface treatment apparatus Pending JPS51111482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50035570A JPS51111482A (en) 1975-03-26 1975-03-26 Sample table for surface treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50035570A JPS51111482A (en) 1975-03-26 1975-03-26 Sample table for surface treatment apparatus

Publications (1)

Publication Number Publication Date
JPS51111482A true JPS51111482A (en) 1976-10-01

Family

ID=12445404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50035570A Pending JPS51111482A (en) 1975-03-26 1975-03-26 Sample table for surface treatment apparatus

Country Status (1)

Country Link
JP (1) JPS51111482A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855559A (en) * 1981-09-25 1983-04-01 Nisshin Haiboruteeji Kk Ion implantation apparatus
JPS6039162A (en) * 1983-08-10 1985-02-28 Anelva Corp Vacuum apparatus for treating thin film
WO1987001452A1 (en) * 1985-08-29 1987-03-12 Hitachi, Ltd. Mass spectroscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855559A (en) * 1981-09-25 1983-04-01 Nisshin Haiboruteeji Kk Ion implantation apparatus
JPS6039162A (en) * 1983-08-10 1985-02-28 Anelva Corp Vacuum apparatus for treating thin film
JPH0215632B2 (en) * 1983-08-10 1990-04-12 Anelva Corp
WO1987001452A1 (en) * 1985-08-29 1987-03-12 Hitachi, Ltd. Mass spectroscope
US5083020A (en) * 1985-08-29 1992-01-21 Hitachi, Ltd. Mass spectrometer

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