JPS57195752A - Vacuum treatment apparatus - Google Patents
Vacuum treatment apparatusInfo
- Publication number
- JPS57195752A JPS57195752A JP56080906A JP8090681A JPS57195752A JP S57195752 A JPS57195752 A JP S57195752A JP 56080906 A JP56080906 A JP 56080906A JP 8090681 A JP8090681 A JP 8090681A JP S57195752 A JPS57195752 A JP S57195752A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- valve
- anode
- discharge
- plasma treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To protect a valve of the titled apparatus for subjecting a plastic to a plasma treatment, by arranging the valve between a vacuum gauge and a vacuum treatment chamber having an anode and a cathode therein for performing a plasma treatment on a plastic molded item, and closing said valve when discharge is effected.
CONSTITUTION: A vacuum treatment chamber 1 for performing a plasma treatment on a plastic molded item under a vacuum continuously is connected via an exhaust pipe 5 to a vacuum pump 4, and is evacuated to be kept at a vacuum on the order of 10-2Torr. A guide roller 18 for guiding a workpiece F between the drum anode 16 and the rodlike anode arranged near the outer periphery of the anode 16 are attached together with electrodes 16, 17 to a side plate 19. A valve 21 is provided in the way of a piping 23 connecting the vacuum chamber 1 with a vacuum gauge sensor 24. When plasma discharge is generated between the cathode 16 and the anode 17, the valve 21 can be closed. Accordingly, when discharge is effected, the vacuum gauge or sensor can be prevented from being broken.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56080906A JPS57195752A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56080906A JPS57195752A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57195752A true JPS57195752A (en) | 1982-12-01 |
Family
ID=13731414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56080906A Pending JPS57195752A (en) | 1981-05-29 | 1981-05-29 | Vacuum treatment apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57195752A (en) |
-
1981
- 1981-05-29 JP JP56080906A patent/JPS57195752A/en active Pending
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