JPS57195752A - Vacuum treatment apparatus - Google Patents

Vacuum treatment apparatus

Info

Publication number
JPS57195752A
JPS57195752A JP56080906A JP8090681A JPS57195752A JP S57195752 A JPS57195752 A JP S57195752A JP 56080906 A JP56080906 A JP 56080906A JP 8090681 A JP8090681 A JP 8090681A JP S57195752 A JPS57195752 A JP S57195752A
Authority
JP
Japan
Prior art keywords
vacuum
valve
anode
discharge
plasma treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56080906A
Other languages
Japanese (ja)
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP56080906A priority Critical patent/JPS57195752A/en
Publication of JPS57195752A publication Critical patent/JPS57195752A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To protect a valve of the titled apparatus for subjecting a plastic to a plasma treatment, by arranging the valve between a vacuum gauge and a vacuum treatment chamber having an anode and a cathode therein for performing a plasma treatment on a plastic molded item, and closing said valve when discharge is effected.
CONSTITUTION: A vacuum treatment chamber 1 for performing a plasma treatment on a plastic molded item under a vacuum continuously is connected via an exhaust pipe 5 to a vacuum pump 4, and is evacuated to be kept at a vacuum on the order of 10-2Torr. A guide roller 18 for guiding a workpiece F between the drum anode 16 and the rodlike anode arranged near the outer periphery of the anode 16 are attached together with electrodes 16, 17 to a side plate 19. A valve 21 is provided in the way of a piping 23 connecting the vacuum chamber 1 with a vacuum gauge sensor 24. When plasma discharge is generated between the cathode 16 and the anode 17, the valve 21 can be closed. Accordingly, when discharge is effected, the vacuum gauge or sensor can be prevented from being broken.
COPYRIGHT: (C)1982,JPO&Japio
JP56080906A 1981-05-29 1981-05-29 Vacuum treatment apparatus Pending JPS57195752A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56080906A JPS57195752A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56080906A JPS57195752A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Publications (1)

Publication Number Publication Date
JPS57195752A true JPS57195752A (en) 1982-12-01

Family

ID=13731414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56080906A Pending JPS57195752A (en) 1981-05-29 1981-05-29 Vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195752A (en)

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