JPS5767912A - Axis aligning method of electronic optical lens barrel - Google Patents

Axis aligning method of electronic optical lens barrel

Info

Publication number
JPS5767912A
JPS5767912A JP14330880A JP14330880A JPS5767912A JP S5767912 A JPS5767912 A JP S5767912A JP 14330880 A JP14330880 A JP 14330880A JP 14330880 A JP14330880 A JP 14330880A JP S5767912 A JPS5767912 A JP S5767912A
Authority
JP
Japan
Prior art keywords
aperture
electron beam
axis aligning
lens
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14330880A
Other languages
English (en)
Other versions
JPH0234139B2 (ja
Inventor
Mamoru Nakasuji
Kanji Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14330880A priority Critical patent/JPS5767912A/ja
Publication of JPS5767912A publication Critical patent/JPS5767912A/ja
Publication of JPH0234139B2 publication Critical patent/JPH0234139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14330880A 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel Granted JPS5767912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14330880A JPS5767912A (en) 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14330880A JPS5767912A (en) 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel

Publications (2)

Publication Number Publication Date
JPS5767912A true JPS5767912A (en) 1982-04-24
JPH0234139B2 JPH0234139B2 (ja) 1990-08-01

Family

ID=15335736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14330880A Granted JPS5767912A (en) 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel

Country Status (1)

Country Link
JP (1) JPS5767912A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091540A (ja) * 1983-10-25 1985-05-22 Jeol Ltd 透過電子顕微鏡における軸合せ方法
JPH04358000A (ja) * 1991-07-02 1992-12-10 Sanyo Electric Co Ltd アイロン
JP2006216299A (ja) * 2005-02-02 2006-08-17 Jeol Ltd 荷電粒子線装置及び荷電粒子線装置における収差補正器の軸合わせ方法
JP2007080785A (ja) * 2005-09-16 2007-03-29 Jeol Ltd 荷電粒子線偏向装置
JP2008084823A (ja) * 2006-03-08 2008-04-10 Hitachi High-Technologies Corp 荷電粒子線調整方法及び荷電粒子線装置
JP2011029185A (ja) * 2009-07-24 2011-02-10 Carl Zeiss Nts Gmbh 絞りユニットを有する粒子ビーム装置および粒子ビーム装置のビーム電流を調整する方法
JP2014212063A (ja) * 2013-04-19 2014-11-13 日本電子株式会社 走査荷電粒子顕微鏡、走査荷電粒子顕微鏡の制御方法、および走査荷電粒子顕微鏡の軸合わせ方法
JP2020074294A (ja) * 2016-01-29 2020-05-14 株式会社日立ハイテク 荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152456A (en) * 1978-05-22 1979-11-30 Akashi Seisakusho Kk Device for centering charged particle beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152456A (en) * 1978-05-22 1979-11-30 Akashi Seisakusho Kk Device for centering charged particle beam

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091540A (ja) * 1983-10-25 1985-05-22 Jeol Ltd 透過電子顕微鏡における軸合せ方法
JPH0378738B2 (ja) * 1983-10-25 1991-12-16 Nippon Electron Optics Lab
JPH04358000A (ja) * 1991-07-02 1992-12-10 Sanyo Electric Co Ltd アイロン
JP2006216299A (ja) * 2005-02-02 2006-08-17 Jeol Ltd 荷電粒子線装置及び荷電粒子線装置における収差補正器の軸合わせ方法
JP2007080785A (ja) * 2005-09-16 2007-03-29 Jeol Ltd 荷電粒子線偏向装置
JP4628230B2 (ja) * 2005-09-16 2011-02-09 日本電子株式会社 荷電粒子線偏向装置
JP2008084823A (ja) * 2006-03-08 2008-04-10 Hitachi High-Technologies Corp 荷電粒子線調整方法及び荷電粒子線装置
JP2011029185A (ja) * 2009-07-24 2011-02-10 Carl Zeiss Nts Gmbh 絞りユニットを有する粒子ビーム装置および粒子ビーム装置のビーム電流を調整する方法
US11139140B2 (en) 2009-07-24 2021-10-05 Carl Zeiss Microscopy Gmbh Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
JP2014212063A (ja) * 2013-04-19 2014-11-13 日本電子株式会社 走査荷電粒子顕微鏡、走査荷電粒子顕微鏡の制御方法、および走査荷電粒子顕微鏡の軸合わせ方法
JP2020074294A (ja) * 2016-01-29 2020-05-14 株式会社日立ハイテク 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0234139B2 (ja) 1990-08-01

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