JPS57122521A - Electro-optical body tube - Google Patents

Electro-optical body tube

Info

Publication number
JPS57122521A
JPS57122521A JP853081A JP853081A JPS57122521A JP S57122521 A JPS57122521 A JP S57122521A JP 853081 A JP853081 A JP 853081A JP 853081 A JP853081 A JP 853081A JP S57122521 A JPS57122521 A JP S57122521A
Authority
JP
Japan
Prior art keywords
aperture
electron gun
lens
electro
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP853081A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP853081A priority Critical patent/JPS57122521A/en
Publication of JPS57122521A publication Critical patent/JPS57122521A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To make an electro-optical body tube smaller in size as well as to facilitate adjustment of lenses and beam current by mechanically sliding a beam shaping aperature for electron beam projectors or the like along the direction of electron beam movement in order to vary the distance between the aperture and the cross-over produced by the electron gun for proper control. CONSTITUTION:Electrons emitted from the electron gun 1 which consists of the cathode 1a, Wehnelt cylinder 1b, and anode 1c made of lanthanumhexaboride irradiates a specimen 4 for projection by means of the objective lens 3 through the beam shaping aperture 2 by which an enlarged image of the cross-over produced by the electron gun can be formed on the main surface of the lens 3. Simultaneously, a reduced image of the aperture 2 can be formed on the specimet 4 by the lens 3. In such a setup, current density on the specimen 4 is detected by an electronic detector or the like to send detected information to a control system 5 so that a drive system 6 is operated by commands from the control system to move the aperture 2 up and down.
JP853081A 1981-01-22 1981-01-22 Electro-optical body tube Pending JPS57122521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP853081A JPS57122521A (en) 1981-01-22 1981-01-22 Electro-optical body tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP853081A JPS57122521A (en) 1981-01-22 1981-01-22 Electro-optical body tube

Publications (1)

Publication Number Publication Date
JPS57122521A true JPS57122521A (en) 1982-07-30

Family

ID=11695695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP853081A Pending JPS57122521A (en) 1981-01-22 1981-01-22 Electro-optical body tube

Country Status (1)

Country Link
JP (1) JPS57122521A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018206918A (en) * 2017-06-02 2018-12-27 株式会社ニューフレアテクノロジー Multi-charged particle beam lithography apparatus and multi-charged particle beam lithography method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018206918A (en) * 2017-06-02 2018-12-27 株式会社ニューフレアテクノロジー Multi-charged particle beam lithography apparatus and multi-charged particle beam lithography method

Similar Documents

Publication Publication Date Title
US2667585A (en) Device for producing screening images of body sections
US4983832A (en) Scanning electron microscope
JPS5568056A (en) X-ray tube
JPH09171791A (en) Scanning type electron microscope
JPS5632655A (en) Electron beam device
WO2019158765A3 (en) X-ray source and x-ray imaging apparatus
US3141993A (en) Very fine beam electron gun
JP2006093161A (en) Electron scanning microscope
US3732426A (en) X-ray source for generating an x-ray beam having selectable sectional shapes
US3219817A (en) Electron emission microscope with means to expose the specimen to ion and electron beams
EP0114714B1 (en) Device comprising a cathode ray tube having low noise electron gun
JPS57122521A (en) Electro-optical body tube
JPS5727551A (en) Electron microscope
JPS5767912A (en) Axis aligning method of electronic optical lens barrel
GB865050A (en) Improvements in or relating to x-ray shadow microscopes with adjustable optical focussing
JPS57130354A (en) Electronic optical bodytube
JPS57122519A (en) Electro-optical body tube
JPS57122522A (en) Electro-optical body tube
JPS57122520A (en) Electro-optical body tube
JP2001243904A (en) Scanning electron microscope
SU664585A3 (en) Acute-focus x-ray tube
JPH0535558Y2 (en)
JPS6465839A (en) Electron beam lithography equipment
EP0132657A1 (en) Aperture imaging electron gun
ES8206128A1 (en) Television camera tube.