JPS56141155A - Analyzed sample position setter - Google Patents

Analyzed sample position setter

Info

Publication number
JPS56141155A
JPS56141155A JP4349080A JP4349080A JPS56141155A JP S56141155 A JPS56141155 A JP S56141155A JP 4349080 A JP4349080 A JP 4349080A JP 4349080 A JP4349080 A JP 4349080A JP S56141155 A JPS56141155 A JP S56141155A
Authority
JP
Japan
Prior art keywords
sample
current
exciting current
prescribed
object lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4349080A
Other languages
Japanese (ja)
Inventor
Mitsuhiko Yamada
Minoru Shinohara
Hiroshi Hidaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4349080A priority Critical patent/JPS56141155A/en
Publication of JPS56141155A publication Critical patent/JPS56141155A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses

Abstract

PURPOSE:To control an exciting current for an object lens so as to focus a smaple always at its prescribed position, by obtaining a current fully larger than the exciting current for forming a prescribed focal length, gradually decreasing said current and obtaining the prescribed exciting current. CONSTITUTION:An electron emitted from a filament 1 is irradiated to a sample 11, and a secondary electron generated from the sample 11 is detected by a secondary electron detector 10. X-ray 12, after passing a collimator 14, is detected by an X-ray detector 13. An exciting current for an object lens 7 is controlled in such a manner that the sample is focused in a position with a certain take-out angle of X-rays obtainable. At this time, the object exciting current is controlled by also considering hysteresis characteristics of a magnetic circuit for the object lens, always decreasing the current gradually from an overfocusing state finally focusing the sample at a prescribed position for the analyzed sample.
JP4349080A 1980-04-04 1980-04-04 Analyzed sample position setter Pending JPS56141155A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4349080A JPS56141155A (en) 1980-04-04 1980-04-04 Analyzed sample position setter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4349080A JPS56141155A (en) 1980-04-04 1980-04-04 Analyzed sample position setter

Publications (1)

Publication Number Publication Date
JPS56141155A true JPS56141155A (en) 1981-11-04

Family

ID=12665149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4349080A Pending JPS56141155A (en) 1980-04-04 1980-04-04 Analyzed sample position setter

Country Status (1)

Country Link
JP (1) JPS56141155A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013037001A (en) * 2011-08-10 2013-02-21 Fei Co Charged-particle microscope providing depth-resolved imagery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013037001A (en) * 2011-08-10 2013-02-21 Fei Co Charged-particle microscope providing depth-resolved imagery

Similar Documents

Publication Publication Date Title
JPS5632655A (en) Electron beam device
US3732426A (en) X-ray source for generating an x-ray beam having selectable sectional shapes
JPS5730253A (en) Secondary electron detector for scan type electron microscope
Held et al. Molecular Cesium Component in Multiphoton Ionization of a Cesium Atomic Beam by a Q-Switched Neodymium-Glass Laser at 1.06 μm
JPS56141155A (en) Analyzed sample position setter
US2440640A (en) Electron microanalyzer
JPS59197881A (en) Reflected electron detecting device having energy selecting function
JPS5768031A (en) Axis aligning mechanism for electron beam exposure device
JPS5543714A (en) Electron beam irradiating method and device for electronic microscope
JPS5542368A (en) Pickup controller
JPS6415604A (en) Measuring apparatus for length by electron beam
US2942114A (en) X-ray control apparatus
JPS5744999A (en) Apparatus for improving precision of examination by fluoroscopy
JPS5260686A (en) X-ray photoelectronic analysis
JPH09283071A (en) Electron beam device
JPS5632722A (en) Ion implanting apparatus
JPS5568060A (en) Scanning electronic microscope or similar equipment
JPS5765660A (en) Ion beam device
JPS58188041A (en) Probe diameter setting method of charged particle rays
JPS6388737A (en) Electron beam emitting device
JPS5769656A (en) X-ray microanalyzer
RU1816520C (en) Method for detection of optical fluorite from ore
JPS56106358A (en) Scan type electron microscope
JPS5467367A (en) Application unit for particle ray
JPS52104889A (en) X-ray generating apparatus