JPS5747876A - Plasma etching apparatus and method - Google Patents
Plasma etching apparatus and methodInfo
- Publication number
- JPS5747876A JPS5747876A JP55121007A JP12100780A JPS5747876A JP S5747876 A JPS5747876 A JP S5747876A JP 55121007 A JP55121007 A JP 55121007A JP 12100780 A JP12100780 A JP 12100780A JP S5747876 A JPS5747876 A JP S5747876A
- Authority
- JP
- Japan
- Prior art keywords
- substance
- chamber
- valve
- ccl
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
- Y10S422/906—Plasma or ion generation means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55121007A JPS5747876A (en) | 1980-09-03 | 1980-09-03 | Plasma etching apparatus and method |
US06/296,305 US4442338A (en) | 1980-09-03 | 1981-08-26 | Plasma etching apparatus |
DE8181106743T DE3163085D1 (en) | 1980-09-03 | 1981-08-28 | Plasma etching apparatus |
EP81106743A EP0047002B1 (en) | 1980-09-03 | 1981-08-28 | Plasma etching apparatus |
DD81233021A DD207927A5 (de) | 1980-09-03 | 1981-09-03 | Plasmaaetzvorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55121007A JPS5747876A (en) | 1980-09-03 | 1980-09-03 | Plasma etching apparatus and method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5747876A true JPS5747876A (en) | 1982-03-18 |
JPS6353268B2 JPS6353268B2 (ja) | 1988-10-21 |
Family
ID=14800474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55121007A Granted JPS5747876A (en) | 1980-09-03 | 1980-09-03 | Plasma etching apparatus and method |
Country Status (5)
Country | Link |
---|---|
US (1) | US4442338A (ja) |
EP (1) | EP0047002B1 (ja) |
JP (1) | JPS5747876A (ja) |
DD (1) | DD207927A5 (ja) |
DE (1) | DE3163085D1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213429A (ja) * | 1982-06-07 | 1983-12-12 | Nec Corp | ドライエツチング装置 |
JPS593927A (ja) * | 1982-06-29 | 1984-01-10 | Fujitsu Ltd | 薄膜のエツチング方法 |
JPS60174242U (ja) * | 1984-04-17 | 1985-11-19 | 株式会社日立国際電気 | リアクテイブイオンエツチング装置 |
JPS61133316A (ja) * | 1984-11-30 | 1986-06-20 | Tokuda Seisakusho Ltd | 熱処理装置 |
JPS61133314A (ja) * | 1984-11-30 | 1986-06-20 | Tokuda Seisakusho Ltd | 熱処理装置 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6017922A (ja) * | 1983-07-12 | 1985-01-29 | Matsushita Electric Ind Co Ltd | 反応性イオンエツチング法 |
US4544418A (en) * | 1984-04-16 | 1985-10-01 | Gibbons James F | Process for high temperature surface reactions in semiconductor material |
US4668366A (en) * | 1984-08-02 | 1987-05-26 | The Perkin-Elmer Corporation | Optical figuring by plasma assisted chemical transport and etching apparatus therefor |
EP0197044A1 (en) * | 1984-10-01 | 1986-10-15 | Tegal Corporation | Process for etching polysilicon with freon 11 and another gas |
US4737235A (en) * | 1984-10-01 | 1988-04-12 | Tegal Corporation | Process for polysilicon with freon 11 and another gas |
US4695700A (en) * | 1984-10-22 | 1987-09-22 | Texas Instruments Incorporated | Dual detector system for determining endpoint of plasma etch process |
JPH0752718B2 (ja) | 1984-11-26 | 1995-06-05 | 株式会社半導体エネルギー研究所 | 薄膜形成方法 |
US6786997B1 (en) | 1984-11-26 | 2004-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus |
US4693777A (en) * | 1984-11-30 | 1987-09-15 | Kabushiki Kaisha Toshiba | Apparatus for producing semiconductor devices |
US5021138A (en) * | 1985-01-17 | 1991-06-04 | Babu Suryadevara V | Side source center sink plasma reactor |
US4582581A (en) * | 1985-05-09 | 1986-04-15 | Allied Corporation | Boron trifluoride system for plasma etching of silicon dioxide |
US4827866A (en) * | 1986-02-24 | 1989-05-09 | Northrop Corporation | Method and apparatus for treating an article in a heated environment |
US4880489A (en) * | 1986-08-26 | 1989-11-14 | Voest-Alpine Aktiengesellschaft | Apparatus for plasma etching circuit boards or the like |
US4885074A (en) * | 1987-02-24 | 1989-12-05 | International Business Machines Corporation | Plasma reactor having segmented electrodes |
JPH05218176A (ja) * | 1992-02-07 | 1993-08-27 | Tokyo Electron Tohoku Kk | 熱処理方法及び被処理体の移載方法 |
JP2674488B2 (ja) * | 1993-12-01 | 1997-11-12 | 日本電気株式会社 | ドライエッチング室のクリーニング方法 |
US5532447A (en) * | 1993-12-06 | 1996-07-02 | Aluminum Company Of America | Method of cleaning an aluminum surface by plasma treatment |
KR0183912B1 (ko) * | 1996-08-08 | 1999-05-01 | 김광호 | 다중 반응 챔버에 연결된 펌핑 설비 및 이를 사용하는 방법 |
US5960158A (en) * | 1997-07-11 | 1999-09-28 | Ag Associates | Apparatus and method for filtering light in a thermal processing chamber |
US5930456A (en) * | 1998-05-14 | 1999-07-27 | Ag Associates | Heating device for semiconductor wafers |
US5970214A (en) * | 1998-05-14 | 1999-10-19 | Ag Associates | Heating device for semiconductor wafers |
US6210484B1 (en) | 1998-09-09 | 2001-04-03 | Steag Rtp Systems, Inc. | Heating device containing a multi-lamp cone for heating semiconductor wafers |
CN104051246B (zh) * | 2013-03-13 | 2017-02-08 | 中芯国际集成电路制造(上海)有限公司 | 一种提高高压栅氧可靠性的方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5291650A (en) * | 1976-01-29 | 1977-08-02 | Toshiba Corp | Continuous gas plasma etching apparatus |
US4252595A (en) * | 1976-01-29 | 1981-02-24 | Tokyo Shibaura Electric Co., Ltd. | Etching apparatus using a plasma |
CA1059882A (en) * | 1976-08-16 | 1979-08-07 | Northern Telecom Limited | Gaseous plasma etching of aluminum and aluminum oxide |
US4057460A (en) * | 1976-11-22 | 1977-11-08 | Data General Corporation | Plasma etching process |
DE2730819A1 (de) * | 1977-07-07 | 1979-01-25 | Siemens Ag | Plasma-aetzverfahren |
US4256534A (en) * | 1978-07-31 | 1981-03-17 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
US4183781A (en) * | 1978-09-25 | 1980-01-15 | International Business Machines Corporation | Stabilization process for aluminum microcircuits which have been reactive-ion etched |
JPS561533A (en) * | 1979-06-18 | 1981-01-09 | Hitachi Ltd | Method of photoetching |
US4335506A (en) * | 1980-08-04 | 1982-06-22 | International Business Machines Corporation | Method of forming aluminum/copper alloy conductors |
-
1980
- 1980-09-03 JP JP55121007A patent/JPS5747876A/ja active Granted
-
1981
- 1981-08-26 US US06/296,305 patent/US4442338A/en not_active Expired - Lifetime
- 1981-08-28 EP EP81106743A patent/EP0047002B1/en not_active Expired
- 1981-08-28 DE DE8181106743T patent/DE3163085D1/de not_active Expired
- 1981-09-03 DD DD81233021A patent/DD207927A5/de not_active IP Right Cessation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213429A (ja) * | 1982-06-07 | 1983-12-12 | Nec Corp | ドライエツチング装置 |
JPS593927A (ja) * | 1982-06-29 | 1984-01-10 | Fujitsu Ltd | 薄膜のエツチング方法 |
JPS60174242U (ja) * | 1984-04-17 | 1985-11-19 | 株式会社日立国際電気 | リアクテイブイオンエツチング装置 |
JPS61133316A (ja) * | 1984-11-30 | 1986-06-20 | Tokuda Seisakusho Ltd | 熱処理装置 |
JPS61133314A (ja) * | 1984-11-30 | 1986-06-20 | Tokuda Seisakusho Ltd | 熱処理装置 |
JPH0346546B2 (ja) * | 1984-11-30 | 1991-07-16 | Tokuda Seisakusho |
Also Published As
Publication number | Publication date |
---|---|
EP0047002A3 (en) | 1982-03-24 |
DD207927A5 (de) | 1984-03-21 |
US4442338A (en) | 1984-04-10 |
JPS6353268B2 (ja) | 1988-10-21 |
EP0047002B1 (en) | 1984-04-11 |
DE3163085D1 (en) | 1984-05-17 |
EP0047002A2 (en) | 1982-03-10 |
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