JPS5742220B2 - - Google Patents

Info

Publication number
JPS5742220B2
JPS5742220B2 JP14085476A JP14085476A JPS5742220B2 JP S5742220 B2 JPS5742220 B2 JP S5742220B2 JP 14085476 A JP14085476 A JP 14085476A JP 14085476 A JP14085476 A JP 14085476A JP S5742220 B2 JPS5742220 B2 JP S5742220B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14085476A
Other languages
Japanese (ja)
Other versions
JPS5365088A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14085476A priority Critical patent/JPS5365088A/ja
Publication of JPS5365088A publication Critical patent/JPS5365088A/ja
Publication of JPS5742220B2 publication Critical patent/JPS5742220B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14085476A 1976-11-22 1976-11-22 Semiconductor device Granted JPS5365088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14085476A JPS5365088A (en) 1976-11-22 1976-11-22 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14085476A JPS5365088A (en) 1976-11-22 1976-11-22 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5365088A JPS5365088A (en) 1978-06-10
JPS5742220B2 true JPS5742220B2 (de) 1982-09-07

Family

ID=15278274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14085476A Granted JPS5365088A (en) 1976-11-22 1976-11-22 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5365088A (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524454A (en) * 1978-08-08 1980-02-21 Nec Corp Insulating gate type field effect transistor
JPS5530876A (en) * 1978-08-28 1980-03-04 Fuji Electric Co Ltd Semiconductor device
JPS5633899A (en) * 1979-08-29 1981-04-04 Cho Lsi Gijutsu Kenkyu Kumiai Method of forming multilayer wire
JPS56130948A (en) * 1980-03-18 1981-10-14 Nec Corp Semiconductor device
JPS5720452A (en) * 1980-07-11 1982-02-02 Matsushita Electric Ind Co Ltd Forming method for multilayer wiring
JPS5748249A (en) * 1980-09-08 1982-03-19 Nec Corp Semiconductor device
JPS57149751A (en) * 1981-03-11 1982-09-16 Nec Corp Semiconductor device
JPS58500680A (ja) * 1981-05-04 1983-04-28 モトロ−ラ・インコ−ポレ−テツド 低抵抗合成金属導体を具えた半導体デバイスおよびその製造方法
JPS57208161A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS57208160A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS6037745A (ja) * 1983-08-10 1985-02-27 Seiko Epson Corp 半導体装置
JPS6154648A (ja) * 1984-08-24 1986-03-18 Mitsubishi Electric Corp 半導体装置の製造方法
IT1213261B (it) * 1984-12-20 1989-12-14 Sgs Thomson Microelectronics Dispositivo a semiconduttore con metallizzazione a piu' spessori eprocedimento per la sua fabbricazione.
JPS61159750A (ja) * 1984-12-31 1986-07-19 Sony Corp 半導体装置及びその製造方法
JPS61183942A (ja) * 1985-02-08 1986-08-16 Fujitsu Ltd 半導体装置の製造方法
JPH069220B2 (ja) * 1985-09-10 1994-02-02 松下電器産業株式会社 多層配線
JPS62118546A (ja) * 1985-11-19 1987-05-29 Mitsubishi Electric Corp 半導体装置の製造方法
JPS63198357A (ja) * 1987-02-13 1988-08-17 Nec Corp 半導体装置
JPS6465856A (en) * 1987-09-05 1989-03-13 Fujitsu Ltd Semiconductor device and manufacture thereof

Also Published As

Publication number Publication date
JPS5365088A (en) 1978-06-10

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