JPS57149751A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57149751A JPS57149751A JP3488681A JP3488681A JPS57149751A JP S57149751 A JPS57149751 A JP S57149751A JP 3488681 A JP3488681 A JP 3488681A JP 3488681 A JP3488681 A JP 3488681A JP S57149751 A JPS57149751 A JP S57149751A
- Authority
- JP
- Japan
- Prior art keywords
- film
- onto
- electrode
- wiring
- polycrystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To obtain stable wiring or electrode having low resistance by using the two layer thin-film of polycrystal Si and a high-melting point metallic nitride or using a multilayer thin-film formed by laminating a high-melting point metallic layer onto the two layer thin-film when the wiring or the electrode is shaped to the semiconductor device. CONSTITUTION:An SiO2 film 11 is formed onto an Si substrate, the polycrystal Si film 12 is deposited onto the film 11 through a CVD method, the Mo2N film 13 is coated onto the film 12 through sputtering in the mixed gas of N2 and Ar, and the whole is used as the wiring or the electrode. The Mo film 14 is further shaped onto the film 13, and the laminate consisting of the films 12, 13, 14 is formed in a desired shape through dry etching. Accordingly, a silicide reaction is not generated between the polycrystal Si and the high-melting point metallic layer, and the stable wiring or electrode having low resistance is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3488681A JPS57149751A (en) | 1981-03-11 | 1981-03-11 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3488681A JPS57149751A (en) | 1981-03-11 | 1981-03-11 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57149751A true JPS57149751A (en) | 1982-09-16 |
Family
ID=12426622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3488681A Pending JPS57149751A (en) | 1981-03-11 | 1981-03-11 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57149751A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177968A (en) * | 1983-03-07 | 1984-10-08 | モトロ−ラ・インコ−ポレ−テツド | Titanium nitride mos device gate electrode |
JPS62200747A (en) * | 1986-02-28 | 1987-09-04 | Toshiba Corp | Manufacture of semiconductor device |
US4935804A (en) * | 1984-03-19 | 1990-06-19 | Fujitsu Limited | Semiconductor device |
JP2002085486A (en) * | 2000-09-14 | 2002-03-26 | Leben Co Ltd | Nursing care grip |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS507430A (en) * | 1973-05-18 | 1975-01-25 | ||
JPS5365088A (en) * | 1976-11-22 | 1978-06-10 | Nec Corp | Semiconductor device |
-
1981
- 1981-03-11 JP JP3488681A patent/JPS57149751A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS507430A (en) * | 1973-05-18 | 1975-01-25 | ||
JPS5365088A (en) * | 1976-11-22 | 1978-06-10 | Nec Corp | Semiconductor device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177968A (en) * | 1983-03-07 | 1984-10-08 | モトロ−ラ・インコ−ポレ−テツド | Titanium nitride mos device gate electrode |
US4935804A (en) * | 1984-03-19 | 1990-06-19 | Fujitsu Limited | Semiconductor device |
JPS62200747A (en) * | 1986-02-28 | 1987-09-04 | Toshiba Corp | Manufacture of semiconductor device |
JP2002085486A (en) * | 2000-09-14 | 2002-03-26 | Leben Co Ltd | Nursing care grip |
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