JPS5730733A - Device for continuous plasma treatment - Google Patents
Device for continuous plasma treatmentInfo
- Publication number
- JPS5730733A JPS5730733A JP10363080A JP10363080A JPS5730733A JP S5730733 A JPS5730733 A JP S5730733A JP 10363080 A JP10363080 A JP 10363080A JP 10363080 A JP10363080 A JP 10363080A JP S5730733 A JPS5730733 A JP S5730733A
- Authority
- JP
- Japan
- Prior art keywords
- roller
- rollers
- sintered
- prevacuum
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009832 plasma treatment Methods 0.000 title 1
- 239000004809 Teflon Substances 0.000 abstract 3
- 229920006362 Teflon® Polymers 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009489 vacuum treatment Methods 0.000 abstract 2
- 241000283216 Phocidae Species 0.000 abstract 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000013013 elastic material Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10363080A JPS5730733A (en) | 1980-07-30 | 1980-07-30 | Device for continuous plasma treatment |
GB8122981A GB2084264B (en) | 1980-07-30 | 1981-07-24 | Continuous vacuum treating apparatus |
NL8103566A NL8103566A (nl) | 1980-07-30 | 1981-07-28 | Doorlopende vacuumbehandelingsinrichting. |
FR818114782A FR2487696B1 (fr) | 1980-07-30 | 1981-07-29 | Appareil de traitement continu sous vide |
DE3129997A DE3129997C2 (de) | 1980-07-30 | 1981-07-29 | Kontinuierlich arbeitende Plasma-Vakuumbehandlungsvorrichtung |
US06/593,964 US4551310A (en) | 1980-07-30 | 1984-03-27 | Continuous vacuum treating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10363080A JPS5730733A (en) | 1980-07-30 | 1980-07-30 | Device for continuous plasma treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5730733A true JPS5730733A (en) | 1982-02-19 |
JPS6136862B2 JPS6136862B2 (ja) | 1986-08-20 |
Family
ID=14359081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10363080A Granted JPS5730733A (en) | 1980-07-30 | 1980-07-30 | Device for continuous plasma treatment |
Country Status (2)
Country | Link |
---|---|
US (1) | US4551310A (ja) |
JP (1) | JPS5730733A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5773025A (en) * | 1980-10-27 | 1982-05-07 | Shin Etsu Chem Co Ltd | Apparatus for continuous vacuum treatment |
JPS57195754A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
JPS60226533A (ja) * | 1984-04-25 | 1985-11-11 | Hitachi Ltd | 連続式プラズマ処理装置 |
JPH0291632U (ja) * | 1988-12-26 | 1990-07-20 |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2178227B (en) * | 1985-06-17 | 1990-01-24 | Honda Motor Co Ltd | Vacuum treating method and apparatus |
US4968918A (en) * | 1987-07-06 | 1990-11-06 | Kanebo, Ltd. | Apparatus for plasma treatment |
JP2691007B2 (ja) * | 1989-03-20 | 1997-12-17 | 株式会社日立製作所 | 真空連続処理装置 |
WO1991017561A1 (en) * | 1990-05-10 | 1991-11-14 | Eastman Kodak Company | Apparatus for-plasma treatment of continuous material |
AU644177B2 (en) * | 1990-05-10 | 1993-12-02 | Eastman Kodak Company | Apparatus for-plasma treatment of continuous material |
US5224441A (en) * | 1991-09-27 | 1993-07-06 | The Boc Group, Inc. | Apparatus for rapid plasma treatments and method |
US6106659A (en) * | 1997-07-14 | 2000-08-22 | The University Of Tennessee Research Corporation | Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials |
US6083355A (en) * | 1997-07-14 | 2000-07-04 | The University Of Tennessee Research Corporation | Electrodes for plasma treater systems |
WO2002070808A1 (en) * | 2000-11-14 | 2002-09-12 | Arteva Technologies S.A.R.L. | Improved steam seal for textile production |
US6878207B2 (en) * | 2003-02-19 | 2005-04-12 | Energy Conversion Devices, Inc. | Gas gate for isolating regions of differing gaseous pressure |
US20070154650A1 (en) * | 2005-12-30 | 2007-07-05 | Atomic Energy Council - Institute Of Nuclear Energy Research | Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure |
JP2007314613A (ja) * | 2006-05-23 | 2007-12-06 | Shin Etsu Chem Co Ltd | 低温プラズマ処理装置 |
EP1953802A3 (en) * | 2007-02-01 | 2012-05-23 | Parker-Hannifin Corporation | Semiconductor process chamber |
FR2975308B1 (fr) * | 2011-05-16 | 2015-06-26 | Valeo Systemes Dessuyage | Dispositif d'etancheite pour le traitement sous vide d'une surface d'un objet |
CN103771183A (zh) * | 2014-01-21 | 2014-05-07 | 深圳市奥坤鑫科技有限公司 | 真空等离子体表面处理设备 |
CN104911554B (zh) * | 2015-04-10 | 2017-07-25 | 中国钢研科技集团有限公司 | 一种锌镁合金镀层钢带的工业化全连续型pvd生产工艺 |
CN110005820A (zh) * | 2019-03-14 | 2019-07-12 | 江阴瑞兴科技有限公司 | 一种卫星式真空锁连续进出料装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50136491A (ja) * | 1974-04-18 | 1975-10-29 | ||
JPS50155776A (ja) * | 1974-06-10 | 1975-12-16 | ||
JPS5147176A (en) * | 1974-10-20 | 1976-04-22 | Santo Tekkosho Kk | Koonshitsunetsusetsutokakosochi |
JPS5296282A (en) * | 1976-02-09 | 1977-08-12 | Santo Tekkosho Kk | Automatic end seal plate control device for sealing device for high pressure steamer |
JPS5495672A (en) * | 1978-01-12 | 1979-07-28 | Nitto Electric Ind Co Ltd | Continuous transfer of film |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2844731A (en) * | 1955-04-22 | 1958-07-22 | Celanese Corp | Film treatment |
US2864756A (en) * | 1955-06-08 | 1958-12-16 | Modern Plastic Machinery Corp | Method and apparatus for the treatment of plastic materials |
US3057792A (en) * | 1957-12-21 | 1962-10-09 | Siemens Ag | Method for improving the imprintability of synthetic material |
US3043715A (en) * | 1958-08-13 | 1962-07-10 | Nat Res Corp | Method and apparatus for vacuum coating metallic substrates |
US3067119A (en) * | 1960-02-11 | 1962-12-04 | American Viscose Corp | Surface treatment of films |
US3367667A (en) * | 1965-07-16 | 1968-02-06 | United States Steel Corp | Roll seal for vacuum strip-treating chamber |
US3507763A (en) * | 1967-12-22 | 1970-04-21 | Du Pont | Method for electrical discharge treatment of organic polymeric materials |
US3661735A (en) * | 1969-10-14 | 1972-05-09 | Johnson & Johnson | Shaped articles having improved surface properties and corona discharge methods and apparatus for making the same |
US3944686A (en) * | 1974-06-19 | 1976-03-16 | Pfizer Inc. | Method for vapor depositing pyrolytic carbon on porous sheets of carbon material |
US4028551A (en) * | 1975-10-17 | 1977-06-07 | Champion International Corporation | Apparatus and method for corona discharge priming a dielectric web |
US4346669A (en) * | 1979-10-12 | 1982-08-31 | General Engineering Radcliffe 1979 Limited | Vacuum chamber seals |
-
1980
- 1980-07-30 JP JP10363080A patent/JPS5730733A/ja active Granted
-
1984
- 1984-03-27 US US06/593,964 patent/US4551310A/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50136491A (ja) * | 1974-04-18 | 1975-10-29 | ||
JPS50155776A (ja) * | 1974-06-10 | 1975-12-16 | ||
JPS5147176A (en) * | 1974-10-20 | 1976-04-22 | Santo Tekkosho Kk | Koonshitsunetsusetsutokakosochi |
JPS5296282A (en) * | 1976-02-09 | 1977-08-12 | Santo Tekkosho Kk | Automatic end seal plate control device for sealing device for high pressure steamer |
JPS5495672A (en) * | 1978-01-12 | 1979-07-28 | Nitto Electric Ind Co Ltd | Continuous transfer of film |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5773025A (en) * | 1980-10-27 | 1982-05-07 | Shin Etsu Chem Co Ltd | Apparatus for continuous vacuum treatment |
JPS6153377B2 (ja) * | 1980-10-27 | 1986-11-17 | Shinetsu Kagaku Kogyo Kk | |
JPS57195754A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
JPH0153294B2 (ja) * | 1981-05-29 | 1989-11-13 | Shinetsu Kagaku Kogyo Kk | |
JPS60226533A (ja) * | 1984-04-25 | 1985-11-11 | Hitachi Ltd | 連続式プラズマ処理装置 |
JPH0291632U (ja) * | 1988-12-26 | 1990-07-20 |
Also Published As
Publication number | Publication date |
---|---|
US4551310A (en) | 1985-11-05 |
JPS6136862B2 (ja) | 1986-08-20 |
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