JPS55146034A - Manufacture for field effect type semiconductor sensor - Google Patents
Manufacture for field effect type semiconductor sensorInfo
- Publication number
- JPS55146034A JPS55146034A JP5452879A JP5452879A JPS55146034A JP S55146034 A JPS55146034 A JP S55146034A JP 5452879 A JP5452879 A JP 5452879A JP 5452879 A JP5452879 A JP 5452879A JP S55146034 A JPS55146034 A JP S55146034A
- Authority
- JP
- Japan
- Prior art keywords
- film
- manufacture
- stable
- type semiconductor
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To obtain stable sensor without contamination on the contact part, after forming the sensing film on the gate insulation film of FET covering the entire surface with stable film by using the alkoxyde solution.
CONSTITUTION: After coating all the surfaces of FET providing the drain contact region 16, source contact region 17 and element sensing section (gate) 19 with stable film made of Si3N4, the solution of metal alkoxyde is coated on the element sensing section 19 and it is in hydrolysis and the sensing film is formed with baking under inactive gas. Further, after removing the surface stable film of drain and source contact and the oxide film under it with plasma etching, the sensor is formed with the drain contact 12 and the source contact 21.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5452879A JPS55146034A (en) | 1979-05-02 | 1979-05-02 | Manufacture for field effect type semiconductor sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5452879A JPS55146034A (en) | 1979-05-02 | 1979-05-02 | Manufacture for field effect type semiconductor sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55146034A true JPS55146034A (en) | 1980-11-14 |
JPS6247251B2 JPS6247251B2 (en) | 1987-10-07 |
Family
ID=12973153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5452879A Granted JPS55146034A (en) | 1979-05-02 | 1979-05-02 | Manufacture for field effect type semiconductor sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55146034A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5924245A (en) * | 1982-07-31 | 1984-02-07 | Shimadzu Corp | Preparation of ion sensor |
JPS60115841A (en) * | 1983-11-28 | 1985-06-22 | Shimadzu Corp | Ion sensor |
JPS6270749A (en) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | Fet sensor and its preparation |
JPH04204367A (en) * | 1990-11-30 | 1992-07-24 | Horiba Ltd | Method for manufacturing ph response film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS648856U (en) * | 1987-06-26 | 1989-01-18 |
-
1979
- 1979-05-02 JP JP5452879A patent/JPS55146034A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5924245A (en) * | 1982-07-31 | 1984-02-07 | Shimadzu Corp | Preparation of ion sensor |
JPS60115841A (en) * | 1983-11-28 | 1985-06-22 | Shimadzu Corp | Ion sensor |
JPH0469337B2 (en) * | 1983-11-28 | 1992-11-05 | Shimadzu Corp | |
JPS6270749A (en) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | Fet sensor and its preparation |
JPH04204367A (en) * | 1990-11-30 | 1992-07-24 | Horiba Ltd | Method for manufacturing ph response film |
Also Published As
Publication number | Publication date |
---|---|
JPS6247251B2 (en) | 1987-10-07 |
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