JPS5524603A - Chemically responsive element and production thereof - Google Patents
Chemically responsive element and production thereofInfo
- Publication number
- JPS5524603A JPS5524603A JP9660278A JP9660278A JPS5524603A JP S5524603 A JPS5524603 A JP S5524603A JP 9660278 A JP9660278 A JP 9660278A JP 9660278 A JP9660278 A JP 9660278A JP S5524603 A JPS5524603 A JP S5524603A
- Authority
- JP
- Japan
- Prior art keywords
- region
- layer
- sio
- substrate
- responsive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To improve the water-proof and ion impermeable property by covering at least such a portion of an FET type chemical responsive element as is to be dipped in a solution to be measured with a preset material as a whole.
CONSTITUTION: A p type Si substrate 41 has its both sides oxidized to form SiO2 layers 60 and 61 at the both sides thereof. Then, the element forming portion is removed from the layer 60 thereby to form on the exposed substrate 41 a drain diffusion region 62, a source diffusion region 63, a p+ channel stopper region 64 and a channel region 65. After an n+ region for contact has been formed, the removed portion of the substrate 41 and layer 60 of a scribe line are removed and selectively etched. The exposed front side of the element is covered with an SiO2 layer 68. After the responsive portion of the element and the layer 60 of the drain contact region are removed, an SiO2 layer 70 is formed so that a gate film 71 is formed on the region 65. Moreover, the front portion of the element is covered with an insulating layer 72 such as impermeable and chemically responsive Sr3N4.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9660278A JPS5524603A (en) | 1978-08-10 | 1978-08-10 | Chemically responsive element and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9660278A JPS5524603A (en) | 1978-08-10 | 1978-08-10 | Chemically responsive element and production thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5524603A true JPS5524603A (en) | 1980-02-21 |
Family
ID=14169415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9660278A Pending JPS5524603A (en) | 1978-08-10 | 1978-08-10 | Chemically responsive element and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5524603A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56160652A (en) * | 1980-05-15 | 1981-12-10 | Matsushita Electric Ind Co Ltd | Manufacture of glass sensitive film of glass electrode |
JPS57203946A (en) * | 1981-06-11 | 1982-12-14 | Olympus Optical Co Ltd | Ion selective electrode |
EP0155193A2 (en) * | 1984-03-16 | 1985-09-18 | Serono Diagnostics Limited | Methods of assay |
JPS62245956A (en) * | 1986-04-18 | 1987-10-27 | Kuraray Co Ltd | Production of isfet ph sensor having good water resistance |
US5068205A (en) * | 1989-05-26 | 1991-11-26 | General Signal Corporation | Header mounted chemically sensitive ISFET and method of manufacture |
JP2016045201A (en) * | 2014-08-19 | 2016-04-04 | ハネウェル・インターナショナル・インコーポレーテッド | Prevention of stray current in sensor of conductive medium |
-
1978
- 1978-08-10 JP JP9660278A patent/JPS5524603A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56160652A (en) * | 1980-05-15 | 1981-12-10 | Matsushita Electric Ind Co Ltd | Manufacture of glass sensitive film of glass electrode |
JPS57203946A (en) * | 1981-06-11 | 1982-12-14 | Olympus Optical Co Ltd | Ion selective electrode |
EP0155193A2 (en) * | 1984-03-16 | 1985-09-18 | Serono Diagnostics Limited | Methods of assay |
JPS62245956A (en) * | 1986-04-18 | 1987-10-27 | Kuraray Co Ltd | Production of isfet ph sensor having good water resistance |
JPH0451786B2 (en) * | 1986-04-18 | 1992-08-20 | Kuraray Co | |
US5068205A (en) * | 1989-05-26 | 1991-11-26 | General Signal Corporation | Header mounted chemically sensitive ISFET and method of manufacture |
JP2016045201A (en) * | 2014-08-19 | 2016-04-04 | ハネウェル・インターナショナル・インコーポレーテッド | Prevention of stray current in sensor of conductive medium |
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