JPS57203946A - Ion selective electrode - Google Patents
Ion selective electrodeInfo
- Publication number
- JPS57203946A JPS57203946A JP56088802A JP8880281A JPS57203946A JP S57203946 A JPS57203946 A JP S57203946A JP 56088802 A JP56088802 A JP 56088802A JP 8880281 A JP8880281 A JP 8880281A JP S57203946 A JPS57203946 A JP S57203946A
- Authority
- JP
- Japan
- Prior art keywords
- film
- outer cylinder
- responsive
- silicon wafer
- aluminum oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/333—Ion-selective electrodes or membranes
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE:To improve the response speed by providing a pH-responsive layer in which at least one of a silicon nitride film, an aluminum oxide film and a tantalum pentoxide film is formed on a silicon wafer. CONSTITUTION:A pH-responsive layer 32 in which a pH-responsive film 34 is formed ona silicon wafer substrate 33 is fixed on the lower end of an outer cylinder 35 by pasting or fusing and a cap 36 is tightly fitted onto the upper end of the outer cylinder 35 to construct a body. In the body, a lead wire 37 hanging down in the outer cylinder 35 is arranged and a core wire 38 is connected to a silicon wafer substrate 33 by a conductive communication 39. The ph-responsive film 34 is made of any one of silicon nitride, aluminum oxide and tantalum pentoxide by vacuum evaporation, sputtering, CVD or the like. More than one layers of these materials are laminated to form a multilayer construction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56088802A JPS57203946A (en) | 1981-06-11 | 1981-06-11 | Ion selective electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56088802A JPS57203946A (en) | 1981-06-11 | 1981-06-11 | Ion selective electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57203946A true JPS57203946A (en) | 1982-12-14 |
Family
ID=13952995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56088802A Pending JPS57203946A (en) | 1981-06-11 | 1981-06-11 | Ion selective electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57203946A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5468514A (en) * | 1990-11-30 | 1995-11-21 | Horiba, Ltd. | Method of producing a pH-responsive membrane |
JP6054749B2 (en) * | 2011-01-07 | 2016-12-27 | 国立大学法人三重大学 | Ion selective electrode |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5524603A (en) * | 1978-08-10 | 1980-02-21 | Olympus Optical Co Ltd | Chemically responsive element and production thereof |
-
1981
- 1981-06-11 JP JP56088802A patent/JPS57203946A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5524603A (en) * | 1978-08-10 | 1980-02-21 | Olympus Optical Co Ltd | Chemically responsive element and production thereof |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5468514A (en) * | 1990-11-30 | 1995-11-21 | Horiba, Ltd. | Method of producing a pH-responsive membrane |
JP6054749B2 (en) * | 2011-01-07 | 2016-12-27 | 国立大学法人三重大学 | Ion selective electrode |
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