JPS57203946A - Ion selective electrode - Google Patents

Ion selective electrode

Info

Publication number
JPS57203946A
JPS57203946A JP56088802A JP8880281A JPS57203946A JP S57203946 A JPS57203946 A JP S57203946A JP 56088802 A JP56088802 A JP 56088802A JP 8880281 A JP8880281 A JP 8880281A JP S57203946 A JPS57203946 A JP S57203946A
Authority
JP
Japan
Prior art keywords
film
outer cylinder
responsive
silicon wafer
aluminum oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56088802A
Other languages
Japanese (ja)
Inventor
Noriaki Ono
Hisashi Kamiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP56088802A priority Critical patent/JPS57203946A/en
Publication of JPS57203946A publication Critical patent/JPS57203946A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/333Ion-selective electrodes or membranes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To improve the response speed by providing a pH-responsive layer in which at least one of a silicon nitride film, an aluminum oxide film and a tantalum pentoxide film is formed on a silicon wafer. CONSTITUTION:A pH-responsive layer 32 in which a pH-responsive film 34 is formed ona silicon wafer substrate 33 is fixed on the lower end of an outer cylinder 35 by pasting or fusing and a cap 36 is tightly fitted onto the upper end of the outer cylinder 35 to construct a body. In the body, a lead wire 37 hanging down in the outer cylinder 35 is arranged and a core wire 38 is connected to a silicon wafer substrate 33 by a conductive communication 39. The ph-responsive film 34 is made of any one of silicon nitride, aluminum oxide and tantalum pentoxide by vacuum evaporation, sputtering, CVD or the like. More than one layers of these materials are laminated to form a multilayer construction.
JP56088802A 1981-06-11 1981-06-11 Ion selective electrode Pending JPS57203946A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56088802A JPS57203946A (en) 1981-06-11 1981-06-11 Ion selective electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56088802A JPS57203946A (en) 1981-06-11 1981-06-11 Ion selective electrode

Publications (1)

Publication Number Publication Date
JPS57203946A true JPS57203946A (en) 1982-12-14

Family

ID=13952995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56088802A Pending JPS57203946A (en) 1981-06-11 1981-06-11 Ion selective electrode

Country Status (1)

Country Link
JP (1) JPS57203946A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468514A (en) * 1990-11-30 1995-11-21 Horiba, Ltd. Method of producing a pH-responsive membrane
JP6054749B2 (en) * 2011-01-07 2016-12-27 国立大学法人三重大学 Ion selective electrode

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524603A (en) * 1978-08-10 1980-02-21 Olympus Optical Co Ltd Chemically responsive element and production thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524603A (en) * 1978-08-10 1980-02-21 Olympus Optical Co Ltd Chemically responsive element and production thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468514A (en) * 1990-11-30 1995-11-21 Horiba, Ltd. Method of producing a pH-responsive membrane
JP6054749B2 (en) * 2011-01-07 2016-12-27 国立大学法人三重大学 Ion selective electrode

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