JPS56160652A - Manufacture of glass sensitive film of glass electrode - Google Patents

Manufacture of glass sensitive film of glass electrode

Info

Publication number
JPS56160652A
JPS56160652A JP6479780A JP6479780A JPS56160652A JP S56160652 A JPS56160652 A JP S56160652A JP 6479780 A JP6479780 A JP 6479780A JP 6479780 A JP6479780 A JP 6479780A JP S56160652 A JPS56160652 A JP S56160652A
Authority
JP
Japan
Prior art keywords
sensitive film
glass
sputtered
target
glassplate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6479780A
Other languages
Japanese (ja)
Inventor
Koichi Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6479780A priority Critical patent/JPS56160652A/en
Publication of JPS56160652A publication Critical patent/JPS56160652A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/36—Glass electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To process a glass sensitive film having a uniform inner resistance characteristic by sputtering a glassplate target to provide the surface of a substrate to be sputtered with a glass sensitive film. CONSTITUTION:A glassplate target 2 is set up in the vacuum tank 3 and a base substance to be sputtered 4 is set up on the holder of the base substance 5 while the pressure inside the vacuum tank 3 is reduced to highten a degree of vacuum. Next, inert gas or reactive gas or both thereof are introduced into the vacuum tank 3 to make the pressure about 10<-2>-10<-3>Torr. Under this condition a high frequency electric field is applied from a power source 7 between the target electrode 1 and the holder of the substrate to be sputtered 4, then the introduced gas is ionized, accelerated to collide the surface of the glassplate target 2 as high energy particles and spring out the atoms and molecules to adhere to the surface of the substrate to be sputtered 4 for forming a glass sensitive film.
JP6479780A 1980-05-15 1980-05-15 Manufacture of glass sensitive film of glass electrode Pending JPS56160652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6479780A JPS56160652A (en) 1980-05-15 1980-05-15 Manufacture of glass sensitive film of glass electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6479780A JPS56160652A (en) 1980-05-15 1980-05-15 Manufacture of glass sensitive film of glass electrode

Publications (1)

Publication Number Publication Date
JPS56160652A true JPS56160652A (en) 1981-12-10

Family

ID=13268579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6479780A Pending JPS56160652A (en) 1980-05-15 1980-05-15 Manufacture of glass sensitive film of glass electrode

Country Status (1)

Country Link
JP (1) JPS56160652A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841737A (en) * 1981-04-15 1983-03-11 コミサリア　タ　レネルジー　アトミック Manufacture of luminescent glass layer and application

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960287A (en) * 1972-08-02 1974-06-11
JPS5524603A (en) * 1978-08-10 1980-02-21 Olympus Optical Co Ltd Chemically responsive element and production thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960287A (en) * 1972-08-02 1974-06-11
JPS5524603A (en) * 1978-08-10 1980-02-21 Olympus Optical Co Ltd Chemically responsive element and production thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841737A (en) * 1981-04-15 1983-03-11 コミサリア　タ　レネルジー　アトミック Manufacture of luminescent glass layer and application

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