KR920016610A - 증착장치 - Google Patents

증착장치 Download PDF

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Publication number
KR920016610A
KR920016610A KR1019920001809A KR920001809A KR920016610A KR 920016610 A KR920016610 A KR 920016610A KR 1019920001809 A KR1019920001809 A KR 1019920001809A KR 920001809 A KR920001809 A KR 920001809A KR 920016610 A KR920016610 A KR 920016610A
Authority
KR
South Korea
Prior art keywords
film
vacuum
deposition
winding
vapor deposition
Prior art date
Application number
KR1019920001809A
Other languages
English (en)
Other versions
KR940011004B1 (ko
Inventor
아키라 오꾸다
요시카즈 요시다
Original Assignee
다니이 아끼오
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다니이 아끼오, 마쯔시다덴기산교 가부시기가이샤 filed Critical 다니이 아끼오
Publication of KR920016610A publication Critical patent/KR920016610A/ko
Application granted granted Critical
Publication of KR940011004B1 publication Critical patent/KR940011004B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

내용 없음

Description

증착장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예에 있어서의 증착장치의 개략단면도, 제2도는 동증착장치에 있어서의 전류계근처와 증착메카니즘을 표시한 구성도.

Claims (1)

  1. 진공체임버와, 그 진공체임버내를 감압분위기로 하기 위한 진공펌프와, 진공체임버내에 증착재료를 구비한 적어도 1개의 진공증착원과, 그 진공증착원에 대향해서 형성되고 필름의 증착면을 냉각하여 회전하는 캔과, 필름을 캔에 공급하는 공급로울러와, 증착된 필름을 감는 감는 로울러와, 필름의 감기 및 주행을 보조하는 자유로울러와, 증착후의 필름에 직류의 전압을 인가하는 전압인가수단을 구비한 증착장치에 있어서, 상기 증착필름과 어어드간에 흐르는 전류를 계측하는 전류계측수단을 형성하는 것을 특징으로 하는 증착장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920001809A 1991-02-08 1992-02-08 증착장치 KR940011004B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP91-17549 1991-02-08
JP3017549A JP2833230B2 (ja) 1991-02-08 1991-02-08 蒸着装置

Publications (2)

Publication Number Publication Date
KR920016610A true KR920016610A (ko) 1992-09-25
KR940011004B1 KR940011004B1 (ko) 1994-11-22

Family

ID=11946999

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920001809A KR940011004B1 (ko) 1991-02-08 1992-02-08 증착장치

Country Status (3)

Country Link
US (1) US5258074A (ko)
JP (1) JP2833230B2 (ko)
KR (1) KR940011004B1 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4222013A1 (de) * 1992-07-04 1994-01-05 Leybold Ag Vorrichtung zur Vakuumbeschichtung von Folien
US5743966A (en) * 1996-05-31 1998-04-28 The Boc Group, Inc. Unwinding of plastic film in the presence of a plasma
KR100296692B1 (ko) * 1996-09-10 2001-10-24 사토 도리 플라즈마cvd장치
US6047660A (en) * 1997-09-06 2000-04-11 Lee; Brent W. Apparatus and method to form coated shielding layer for coaxial signal transmission cables
US7025856B2 (en) * 2001-02-02 2006-04-11 The Regents Of The University Of California Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge
JP4516304B2 (ja) * 2003-11-20 2010-08-04 株式会社アルバック 巻取式真空蒸着方法及び巻取式真空蒸着装置
CN100562602C (zh) * 2005-02-16 2009-11-25 株式会社爱发科 卷取式真空成膜装置
EP1870488A1 (de) * 2006-06-23 2007-12-26 Applied Materials GmbH & Co. KG Vorrichtung zur Beeinflussung des elektrostatischen Zustands einer Folie
EP2119813A1 (en) * 2008-05-16 2009-11-18 Applied Materials, Inc. Coating device with insulation
JP5481239B2 (ja) * 2009-03-18 2014-04-23 東レ株式会社 薄膜付シートの製造装置及び薄膜付シートの製造方法、並びにこれらに用いられる円筒状ロール
JP2013036104A (ja) * 2011-08-10 2013-02-21 Toray Advanced Film Co Ltd 薄膜形成方法および薄膜形成装置
CN103361623B (zh) * 2013-07-30 2016-07-06 林正亮 一种卷绕蒸发式真空镀膜机
DE102019204818A1 (de) * 2019-04-04 2020-10-08 Robert Bosch Gmbh Verfahren zur Überwachung eines plasmagestützten Prozesses zur Beschichtung eines Bauteils und Vorrichtung zur Beschichtung eines Bauteils

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130443A (ja) * 1982-01-28 1983-08-03 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
JPS5916970A (ja) * 1982-07-15 1984-01-28 Citizen Watch Co Ltd イオンプレ−テイングにおける蒸発材の蒸発量検知及び制御方法
JPH04276061A (ja) * 1991-03-05 1992-10-01 Matsushita Electric Ind Co Ltd 蒸着装置

Also Published As

Publication number Publication date
JPH04259374A (ja) 1992-09-14
US5258074A (en) 1993-11-02
JP2833230B2 (ja) 1998-12-09
KR940011004B1 (ko) 1994-11-22

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