JPS57208148A - Manufacture of mesa type semiconductor device - Google Patents

Manufacture of mesa type semiconductor device

Info

Publication number
JPS57208148A
JPS57208148A JP56093148A JP9314881A JPS57208148A JP S57208148 A JPS57208148 A JP S57208148A JP 56093148 A JP56093148 A JP 56093148A JP 9314881 A JP9314881 A JP 9314881A JP S57208148 A JPS57208148 A JP S57208148A
Authority
JP
Japan
Prior art keywords
film
glass
films
forming
mesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56093148A
Other languages
Japanese (ja)
Inventor
Masatake Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56093148A priority Critical patent/JPS57208148A/en
Publication of JPS57208148A publication Critical patent/JPS57208148A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To prevent the external contamination of a semiconductor device by formig a mesa groove with a photoresist film and an insulating film as masks, forming by an electrophoresis a glass protective film on the mesa groove part and forming a glass protective film on the film with the resist film as a mask. CONSTITUTION:Photoresist films 9 are covered on both side surfaces of a semiconductor substrate, and mesa groove windows 10a, 10b are opened at insulating films 6. Then the windows 10a, 10b are chemically etched with the films 9, 6 as masks to respectively form mesa grooves 11a, 11b through P-N junctions 4, 5 and to expose the P-N junctions 4, 5, 8. Subsequently, glass powder is selectively coated by an electrophoresis on the grooves 11a, 11b, thereby forming a glass particle layer. Then, a substrate is heated and molten to form the first glass protective films 12, 13. Then, a photoresist film 14 is newly covered on one main surface of the substrate, and the second glass protective film 16 is selectively formed by a screen printing method with the film as a mask. The melting temperatures of the glass material of the first and second protective films are selected at points different from each other.
JP56093148A 1981-06-17 1981-06-17 Manufacture of mesa type semiconductor device Pending JPS57208148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56093148A JPS57208148A (en) 1981-06-17 1981-06-17 Manufacture of mesa type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56093148A JPS57208148A (en) 1981-06-17 1981-06-17 Manufacture of mesa type semiconductor device

Publications (1)

Publication Number Publication Date
JPS57208148A true JPS57208148A (en) 1982-12-21

Family

ID=14074442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56093148A Pending JPS57208148A (en) 1981-06-17 1981-06-17 Manufacture of mesa type semiconductor device

Country Status (1)

Country Link
JP (1) JPS57208148A (en)

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