JPS5415669A - Manufacture of mesa-type semiconductor device - Google Patents
Manufacture of mesa-type semiconductor deviceInfo
- Publication number
- JPS5415669A JPS5415669A JP8131177A JP8131177A JPS5415669A JP S5415669 A JPS5415669 A JP S5415669A JP 8131177 A JP8131177 A JP 8131177A JP 8131177 A JP8131177 A JP 8131177A JP S5415669 A JPS5415669 A JP S5415669A
- Authority
- JP
- Japan
- Prior art keywords
- mesa
- manufacture
- semiconductor device
- type semiconductor
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To increase the yield by carrying out a mesa etching by using the photo resist and the lamination of the insulator films as the mask and then forming the glass particle layer to the mesa groove through the electrophoresis method with the same mask.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8131177A JPS5415669A (en) | 1977-07-06 | 1977-07-06 | Manufacture of mesa-type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8131177A JPS5415669A (en) | 1977-07-06 | 1977-07-06 | Manufacture of mesa-type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5415669A true JPS5415669A (en) | 1979-02-05 |
Family
ID=13742843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8131177A Pending JPS5415669A (en) | 1977-07-06 | 1977-07-06 | Manufacture of mesa-type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5415669A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4910685A (en) * | 1972-05-24 | 1974-01-30 | ||
JPS5780736A (en) * | 1980-11-10 | 1982-05-20 | Toshiba Corp | Semiconductor device |
US4766088A (en) * | 1982-10-22 | 1988-08-23 | Ricoh Company, Ltd. | Method of making a memory device with polysilicon electrodes |
-
1977
- 1977-07-06 JP JP8131177A patent/JPS5415669A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4910685A (en) * | 1972-05-24 | 1974-01-30 | ||
JPS558814B2 (en) * | 1972-05-24 | 1980-03-06 | ||
JPS5780736A (en) * | 1980-11-10 | 1982-05-20 | Toshiba Corp | Semiconductor device |
US4766088A (en) * | 1982-10-22 | 1988-08-23 | Ricoh Company, Ltd. | Method of making a memory device with polysilicon electrodes |
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