JPS5415669A - Manufacture of mesa-type semiconductor device - Google Patents

Manufacture of mesa-type semiconductor device

Info

Publication number
JPS5415669A
JPS5415669A JP8131177A JP8131177A JPS5415669A JP S5415669 A JPS5415669 A JP S5415669A JP 8131177 A JP8131177 A JP 8131177A JP 8131177 A JP8131177 A JP 8131177A JP S5415669 A JPS5415669 A JP S5415669A
Authority
JP
Japan
Prior art keywords
mesa
manufacture
semiconductor device
type semiconductor
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8131177A
Other languages
Japanese (ja)
Inventor
Masatake Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8131177A priority Critical patent/JPS5415669A/en
Publication of JPS5415669A publication Critical patent/JPS5415669A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To increase the yield by carrying out a mesa etching by using the photo resist and the lamination of the insulator films as the mask and then forming the glass particle layer to the mesa groove through the electrophoresis method with the same mask.
COPYRIGHT: (C)1979,JPO&Japio
JP8131177A 1977-07-06 1977-07-06 Manufacture of mesa-type semiconductor device Pending JPS5415669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8131177A JPS5415669A (en) 1977-07-06 1977-07-06 Manufacture of mesa-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8131177A JPS5415669A (en) 1977-07-06 1977-07-06 Manufacture of mesa-type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5415669A true JPS5415669A (en) 1979-02-05

Family

ID=13742843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8131177A Pending JPS5415669A (en) 1977-07-06 1977-07-06 Manufacture of mesa-type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5415669A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910685A (en) * 1972-05-24 1974-01-30
JPS5780736A (en) * 1980-11-10 1982-05-20 Toshiba Corp Semiconductor device
US4766088A (en) * 1982-10-22 1988-08-23 Ricoh Company, Ltd. Method of making a memory device with polysilicon electrodes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910685A (en) * 1972-05-24 1974-01-30
JPS558814B2 (en) * 1972-05-24 1980-03-06
JPS5780736A (en) * 1980-11-10 1982-05-20 Toshiba Corp Semiconductor device
US4766088A (en) * 1982-10-22 1988-08-23 Ricoh Company, Ltd. Method of making a memory device with polysilicon electrodes

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