JPS57193039A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57193039A
JPS57193039A JP7753881A JP7753881A JPS57193039A JP S57193039 A JPS57193039 A JP S57193039A JP 7753881 A JP7753881 A JP 7753881A JP 7753881 A JP7753881 A JP 7753881A JP S57193039 A JPS57193039 A JP S57193039A
Authority
JP
Japan
Prior art keywords
substrate
gettering
main surface
semiconductor device
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7753881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542134B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuyoshi Kobayashi
Kiyoshi Ujita
Tokuro Soma
Naoki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP7753881A priority Critical patent/JPS57193039A/ja
Publication of JPS57193039A publication Critical patent/JPS57193039A/ja
Publication of JPH0542134B2 publication Critical patent/JPH0542134B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
JP7753881A 1981-05-22 1981-05-22 Manufacture of semiconductor device Granted JPS57193039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7753881A JPS57193039A (en) 1981-05-22 1981-05-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7753881A JPS57193039A (en) 1981-05-22 1981-05-22 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57193039A true JPS57193039A (en) 1982-11-27
JPH0542134B2 JPH0542134B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-25

Family

ID=13636765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7753881A Granted JPS57193039A (en) 1981-05-22 1981-05-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57193039A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338506A (ja) * 1993-05-28 1994-12-06 Nec Corp 半導体基板およびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130979A (en) * 1977-04-20 1978-11-15 Nec Corp Manufacture for semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130979A (en) * 1977-04-20 1978-11-15 Nec Corp Manufacture for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338506A (ja) * 1993-05-28 1994-12-06 Nec Corp 半導体基板およびその製造方法

Also Published As

Publication number Publication date
JPH0542134B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-25

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