JPS57180146A - Formation of elements isolation region - Google Patents

Formation of elements isolation region

Info

Publication number
JPS57180146A
JPS57180146A JP56065528A JP6552881A JPS57180146A JP S57180146 A JPS57180146 A JP S57180146A JP 56065528 A JP56065528 A JP 56065528A JP 6552881 A JP6552881 A JP 6552881A JP S57180146 A JPS57180146 A JP S57180146A
Authority
JP
Japan
Prior art keywords
layers
grooves
buried
isolation
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56065528A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139735B2 (enrdf_load_stackoverflow
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56065528A priority Critical patent/JPS57180146A/ja
Publication of JPS57180146A publication Critical patent/JPS57180146A/ja
Publication of JPS6139735B2 publication Critical patent/JPS6139735B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP56065528A 1981-04-30 1981-04-30 Formation of elements isolation region Granted JPS57180146A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56065528A JPS57180146A (en) 1981-04-30 1981-04-30 Formation of elements isolation region

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56065528A JPS57180146A (en) 1981-04-30 1981-04-30 Formation of elements isolation region

Publications (2)

Publication Number Publication Date
JPS57180146A true JPS57180146A (en) 1982-11-06
JPS6139735B2 JPS6139735B2 (enrdf_load_stackoverflow) 1986-09-05

Family

ID=13289597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56065528A Granted JPS57180146A (en) 1981-04-30 1981-04-30 Formation of elements isolation region

Country Status (1)

Country Link
JP (1) JPS57180146A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59106133A (ja) * 1982-12-09 1984-06-19 Nec Corp 集積回路装置
JPS6097661A (ja) * 1983-11-02 1985-05-31 Hitachi Ltd 半導体集積回路装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0183842U (enrdf_load_stackoverflow) * 1987-11-26 1989-06-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59106133A (ja) * 1982-12-09 1984-06-19 Nec Corp 集積回路装置
JPS6097661A (ja) * 1983-11-02 1985-05-31 Hitachi Ltd 半導体集積回路装置

Also Published As

Publication number Publication date
JPS6139735B2 (enrdf_load_stackoverflow) 1986-09-05

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