JPS57173956A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57173956A JPS57173956A JP5909481A JP5909481A JPS57173956A JP S57173956 A JPS57173956 A JP S57173956A JP 5909481 A JP5909481 A JP 5909481A JP 5909481 A JP5909481 A JP 5909481A JP S57173956 A JPS57173956 A JP S57173956A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- film
- substrate
- resist
- thinned out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE:To simplify a manufacturing process by a method wherein an oxide film on a semiconductor substrate is placed under a resist pattern and etched to be thinned out and then ions are implanted in the substrate through the thinned film. CONSTITUTION:An N<+> type buried layer 42 is formed on a P type semiconductor substrate 41 in an O2 atmosphere and, at the same time, an oxide film 43 is formed all over the substrate 41. The oxide film 43 is covered by a resist film 44 and then openings 45 are provided through the resist film 44 in regions where an impurity layer for sub-isolation is planned to be formed for isolating the oxide film 43. The oxide film 43 is subjected to etching with the resist film 44 acting as a mask so that the oxide film 43 at the bottom of the openings 45 is thinned out into an oxide film 43'. The oxide film 43 on the rear side of the substrate 41 not covered by the resist film 44 is also thinned out. B ions are implanted in the substrate 41 through the thin oxide film 43', the resist film 44 is removed, and then driving in is effected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5909481A JPS57173956A (en) | 1981-04-21 | 1981-04-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5909481A JPS57173956A (en) | 1981-04-21 | 1981-04-21 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57173956A true JPS57173956A (en) | 1982-10-26 |
Family
ID=13103396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5909481A Pending JPS57173956A (en) | 1981-04-21 | 1981-04-21 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57173956A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100393962B1 (en) * | 1996-12-26 | 2003-11-17 | 주식회사 하이닉스반도체 | Method for manufacturing semiconductor device |
KR100442854B1 (en) * | 1997-10-06 | 2004-09-18 | 삼성전자주식회사 | Method for fabricating semiconductor device to effectively reduce stress applied to semiconductor substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4948278A (en) * | 1972-08-30 | 1974-05-10 |
-
1981
- 1981-04-21 JP JP5909481A patent/JPS57173956A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4948278A (en) * | 1972-08-30 | 1974-05-10 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100393962B1 (en) * | 1996-12-26 | 2003-11-17 | 주식회사 하이닉스반도체 | Method for manufacturing semiconductor device |
KR100442854B1 (en) * | 1997-10-06 | 2004-09-18 | 삼성전자주식회사 | Method for fabricating semiconductor device to effectively reduce stress applied to semiconductor substrate |
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