JPS57152174A - Manufacture of light receiving device - Google Patents

Manufacture of light receiving device

Info

Publication number
JPS57152174A
JPS57152174A JP56035313A JP3531381A JPS57152174A JP S57152174 A JPS57152174 A JP S57152174A JP 56035313 A JP56035313 A JP 56035313A JP 3531381 A JP3531381 A JP 3531381A JP S57152174 A JPS57152174 A JP S57152174A
Authority
JP
Japan
Prior art keywords
oxide
solid state
state imaging
light
transparent conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56035313A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214790B2 (cs
Inventor
Yasuo Tanaka
Akira Sasano
Toshihisa Tsukada
Taiji Shimomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56035313A priority Critical patent/JPS57152174A/ja
Priority to US06/357,076 priority patent/US4412900A/en
Priority to EP82301284A priority patent/EP0060699B1/en
Priority to DE8282301284T priority patent/DE3276889D1/de
Priority to CA000398275A priority patent/CA1168739A/en
Priority to KR8201078A priority patent/KR860000160B1/ko
Publication of JPS57152174A publication Critical patent/JPS57152174A/ja
Publication of JPH0214790B2 publication Critical patent/JPH0214790B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Transforming Light Signals Into Electric Signals (AREA)
  • Photovoltaic Devices (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP56035313A 1981-03-13 1981-03-13 Manufacture of light receiving device Granted JPS57152174A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP56035313A JPS57152174A (en) 1981-03-13 1981-03-13 Manufacture of light receiving device
US06/357,076 US4412900A (en) 1981-03-13 1982-03-11 Method of manufacturing photosensors
EP82301284A EP0060699B1 (en) 1981-03-13 1982-03-12 Method of manufacturing photosensors
DE8282301284T DE3276889D1 (en) 1981-03-13 1982-03-12 Method of manufacturing photosensors
CA000398275A CA1168739A (en) 1981-03-13 1982-03-12 Method of manufacturing photosensors
KR8201078A KR860000160B1 (ko) 1981-03-13 1982-03-13 수광소자의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56035313A JPS57152174A (en) 1981-03-13 1981-03-13 Manufacture of light receiving device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3065969A Division JPH04211171A (ja) 1991-03-29 1991-03-29 受光素子

Publications (2)

Publication Number Publication Date
JPS57152174A true JPS57152174A (en) 1982-09-20
JPH0214790B2 JPH0214790B2 (cs) 1990-04-10

Family

ID=12438308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56035313A Granted JPS57152174A (en) 1981-03-13 1981-03-13 Manufacture of light receiving device

Country Status (1)

Country Link
JP (1) JPS57152174A (cs)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59110179A (ja) * 1982-12-16 1984-06-26 Hitachi Ltd 半導体装置およびその製造法
JPS59227173A (ja) * 1983-06-08 1984-12-20 Fuji Xerox Co Ltd 光電変換素子およびその製造方法
JPS60239069A (ja) * 1984-05-11 1985-11-27 Sanyo Electric Co Ltd 非晶質太陽電池
JPS61168272A (ja) * 1985-01-21 1986-07-29 Semiconductor Energy Lab Co Ltd 非単結剤珪素太陽電池作製方法
JPS61237423A (ja) * 1985-04-15 1986-10-22 Kanegafuchi Chem Ind Co Ltd 非晶質半導体上への電極形成法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342693A (en) * 1976-09-29 1978-04-18 Rca Corp Semiconductor device including amorphous silicone layer
JPS5539404A (en) * 1978-08-18 1980-03-19 Hitachi Ltd Solid state pickup device
JPS5623772A (en) * 1979-08-01 1981-03-06 Hitachi Ltd Photodetecting face plate and its manufacture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342693A (en) * 1976-09-29 1978-04-18 Rca Corp Semiconductor device including amorphous silicone layer
JPS5539404A (en) * 1978-08-18 1980-03-19 Hitachi Ltd Solid state pickup device
JPS5623772A (en) * 1979-08-01 1981-03-06 Hitachi Ltd Photodetecting face plate and its manufacture

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59110179A (ja) * 1982-12-16 1984-06-26 Hitachi Ltd 半導体装置およびその製造法
JPS59227173A (ja) * 1983-06-08 1984-12-20 Fuji Xerox Co Ltd 光電変換素子およびその製造方法
JPS60239069A (ja) * 1984-05-11 1985-11-27 Sanyo Electric Co Ltd 非晶質太陽電池
JPS61168272A (ja) * 1985-01-21 1986-07-29 Semiconductor Energy Lab Co Ltd 非単結剤珪素太陽電池作製方法
JPS61237423A (ja) * 1985-04-15 1986-10-22 Kanegafuchi Chem Ind Co Ltd 非晶質半導体上への電極形成法

Also Published As

Publication number Publication date
JPH0214790B2 (cs) 1990-04-10

Similar Documents

Publication Publication Date Title
JPS55120182A (en) Photoelectric converter
JPS56157075A (en) Photoelectric transducing device
JPS57152174A (en) Manufacture of light receiving device
JPS5739588A (en) Solid state image pickup device
JPS5499576A (en) Thin-film transistor and its manufacture
JPS5562771A (en) Integrated circuit device
JPS6247170A (ja) 高逆方向抵抗形ダイオ−ド装置
JPS5750466A (en) Semiconductor memory device
JPS5735318A (en) Manufacture of semiconductor device
JPS56104478A (en) Solid state image pickup element
JPS5669875A (en) Amorphous semiconductor solar cell
JPS5583268A (en) Complementary mos semiconductor device and method of fabricating the same
JPS5614148A (en) Semiconductor ion selective electrode
JPS5552262A (en) Mos semiconductor device
JPS5632774A (en) Thin film type photovoltaic element and manufacture thereof
JPS5679245A (en) Ion sensor
JPS6461061A (en) A-si thin film transistor
JPS57173969A (en) Solid state image pickup device
JPS5713769A (en) Semiconductor device and manufacture thereof
JPS5688366A (en) Semiconductor device
JPS5664467A (en) Mos type semiconductor device
JPS5780639A (en) Target of photo conductive pickup tube
JPS5360195A (en) Photoelectric transducer
JPS56147469A (en) Semiconductor device
JPS6431457A (en) Manufacture of thin film transistor