JPS56104478A - Solid state image pickup element - Google Patents
Solid state image pickup elementInfo
- Publication number
- JPS56104478A JPS56104478A JP666880A JP666880A JPS56104478A JP S56104478 A JPS56104478 A JP S56104478A JP 666880 A JP666880 A JP 666880A JP 666880 A JP666880 A JP 666880A JP S56104478 A JPS56104478 A JP S56104478A
- Authority
- JP
- Japan
- Prior art keywords
- film
- photoreceptor
- image pickup
- solid state
- state image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 title abstract 2
- 108091008695 photoreceptors Proteins 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 230000035945 sensitivity Effects 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 230000003595 spectral effect Effects 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
Abstract
PURPOSE:To improve the short wavelength sensitivity of the solid state image pickup element by empolying an extremely thin polycrystalline silicon film on the transparent electrode of a photoreceptor and utilizing the multiplex interference effect. CONSTITUTION:A thin polycrystalline silicon film 3 is formed as a transparent electrode through an insulating film 2 formed of SiO2 or the like on the substrate 1 to form the photoreceptor 4. The thickness d2 of the film 3 of the photoreceptor 4 is formed less than 800Angstrom in such a manner that the spectral sensitivity of the film 3 and accordingly the photoreceptor 4 is set at its peak value to the objective short wavelength and accordingly the wavelength of the vicinity of 450nm (blue wavelength) by utilizing the multiplex interference effect with the film 2. The thickness d2 of the film 3 is selected to be 300Angstrom <=d2<=800Angstrom .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP666880A JPS56104478A (en) | 1980-01-23 | 1980-01-23 | Solid state image pickup element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP666880A JPS56104478A (en) | 1980-01-23 | 1980-01-23 | Solid state image pickup element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56104478A true JPS56104478A (en) | 1981-08-20 |
Family
ID=11644744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP666880A Pending JPS56104478A (en) | 1980-01-23 | 1980-01-23 | Solid state image pickup element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56104478A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63244879A (en) * | 1987-03-31 | 1988-10-12 | Toshiba Corp | Solid-state image sensing device |
JPH06244400A (en) * | 1993-02-15 | 1994-09-02 | Nec Corp | Solid-state image pick-up device |
-
1980
- 1980-01-23 JP JP666880A patent/JPS56104478A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63244879A (en) * | 1987-03-31 | 1988-10-12 | Toshiba Corp | Solid-state image sensing device |
JPH06244400A (en) * | 1993-02-15 | 1994-09-02 | Nec Corp | Solid-state image pick-up device |
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