JPS57148370A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57148370A JPS57148370A JP3443681A JP3443681A JPS57148370A JP S57148370 A JPS57148370 A JP S57148370A JP 3443681 A JP3443681 A JP 3443681A JP 3443681 A JP3443681 A JP 3443681A JP S57148370 A JPS57148370 A JP S57148370A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- collector
- type impurities
- region
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 7
- 238000000034 method Methods 0.000 abstract 5
- 239000012535 impurity Substances 0.000 abstract 4
- 239000010409 thin film Substances 0.000 abstract 3
- 239000012808 vapor phase Substances 0.000 abstract 3
- 239000010408 film Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000003071 parasitic effect Effects 0.000 abstract 1
- 238000001947 vapour-phase growth Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To sharply reduce the process of manufacture for the subject semiconductor device by a method wherein an element is formed using a one conductive type semiconductor substrate which was formed without performing a vapor-phase growing method, and a semiconductor thin film formed on the above-mentioned substrate by performing vapor-phase growing. CONSTITUTION:An insulating film 25, whereon an aperture section 32 was selectively formed, is covered on the P type semiconductor 21 with a collector region 22 whereon N type impurities were diffused, a semiconductor thin film is selectively provided by vapor-phase growth containing P type impurities in such a manner that the aperture section 32 will be covered, and a base region 26 is formed. An emitter region 27 is formed on the aperture section 32 of the region 26 by diffusing N type impurities, and a collector electrode 29, an emitter electrode 30 and a base electrode 31 are arranged through the intermediary of an insulating film 28 which was selectively formed. Accordingly, the desired purpose can be attained by performing only one vapor-phase growing process maintaining the same collector junction capacitance. Also, a collector contact layer may not be provided in order to reduce parasitic collector resistance. Besides, the process of manufacture can be reduced to dispense with the diffusion of P type impurities into the semiconductor thin film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3443681A JPS57148370A (en) | 1981-03-10 | 1981-03-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3443681A JPS57148370A (en) | 1981-03-10 | 1981-03-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57148370A true JPS57148370A (en) | 1982-09-13 |
Family
ID=12414169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3443681A Pending JPS57148370A (en) | 1981-03-10 | 1981-03-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57148370A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63239982A (en) * | 1987-03-27 | 1988-10-05 | Fujitsu Ltd | Manufacture of bipolar semiconductor device |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933434A (en) * | 1972-07-20 | 1974-03-27 | ||
JPS5011676A (en) * | 1973-06-01 | 1975-02-06 | ||
JPS5132074A (en) * | 1974-09-11 | 1976-03-18 | Tetsutaro Mori | Senkohodenkan no tentokairo |
JPS5140790A (en) * | 1974-10-04 | 1976-04-05 | Oki Electric Ind Co Ltd | |
JPS51111071A (en) * | 1975-03-26 | 1976-10-01 | Hitachi Ltd | Semiconductor equipment |
JPS561556A (en) * | 1979-06-18 | 1981-01-09 | Hitachi Ltd | Semiconductor device |
-
1981
- 1981-03-10 JP JP3443681A patent/JPS57148370A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933434A (en) * | 1972-07-20 | 1974-03-27 | ||
JPS5011676A (en) * | 1973-06-01 | 1975-02-06 | ||
JPS5132074A (en) * | 1974-09-11 | 1976-03-18 | Tetsutaro Mori | Senkohodenkan no tentokairo |
JPS5140790A (en) * | 1974-10-04 | 1976-04-05 | Oki Electric Ind Co Ltd | |
JPS51111071A (en) * | 1975-03-26 | 1976-10-01 | Hitachi Ltd | Semiconductor equipment |
JPS561556A (en) * | 1979-06-18 | 1981-01-09 | Hitachi Ltd | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63239982A (en) * | 1987-03-27 | 1988-10-05 | Fujitsu Ltd | Manufacture of bipolar semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57148370A (en) | Semiconductor device | |
JPS5769778A (en) | Semiconductor device | |
JPS5493366A (en) | Bipolar type transistor | |
JPS5710969A (en) | Semiconductor device and manufacture thereof | |
JPS54111792A (en) | Semiconductor device and its manufacture | |
JPS57199251A (en) | Semiconductor device | |
JPS56142631A (en) | Manufacture of semiconductor device | |
JPS5654063A (en) | Semiconductor device | |
JPS55163871A (en) | Semiconductor integrated circuit device | |
JPS5710964A (en) | Manufacture of semiconductor device | |
JPS55102265A (en) | Fabricating method of composite transistor | |
JPS57112071A (en) | Semiconductor device | |
JPS5752162A (en) | Semiconductor device | |
JPS5674963A (en) | Horizontal-type transistor | |
JPS5654062A (en) | Production of semiconductor device | |
JPS5680158A (en) | Semiconductor device | |
JPS5522835A (en) | Manufacturing of transistor | |
JPS57130465A (en) | Semiconductor device | |
JPS57134976A (en) | Manufacture of field effect transistor | |
JPS5453869A (en) | Semiconductor device | |
JPS5623770A (en) | Manufacture of semiconductor device | |
JPS56135964A (en) | Semiconductor device | |
JPS5683061A (en) | Semiconductor device | |
JPS5787170A (en) | Semiconductor device | |
JPS5666067A (en) | Semiconductor device and its manufacture |