JPS5752162A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5752162A JPS5752162A JP12709780A JP12709780A JPS5752162A JP S5752162 A JPS5752162 A JP S5752162A JP 12709780 A JP12709780 A JP 12709780A JP 12709780 A JP12709780 A JP 12709780A JP S5752162 A JPS5752162 A JP S5752162A
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- low resistance
- base
- injection method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 238000002347 injection Methods 0.000 abstract 2
- 239000007924 injection Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- -1 Phosphorus ions Chemical class 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To obtain a lateral bipolar transistor improved in the electric characteristic by forming a low resistance base region by an ion injection method under an emitter region. CONSTITUTION:Phosphorus ions are injected on a P type silicon substrate 1 to form an N type region 10, and a collector region 5, a base region 6 and an emitter region 7 are diffused in an N type region 10. A P<+> type low resistance layer 11 is formed by an ion injection method on the bottom of the base region, and a P<+> type region 12 for connecting the base electrode to the low resistance layer 11 is formed. In this manner, it can avoid the problem of crystalline defect in a lateral transistor and can obtain the lateral transistor having excellent characteristics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12709780A JPS5752162A (en) | 1980-09-16 | 1980-09-16 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12709780A JPS5752162A (en) | 1980-09-16 | 1980-09-16 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5752162A true JPS5752162A (en) | 1982-03-27 |
Family
ID=14951504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12709780A Pending JPS5752162A (en) | 1980-09-16 | 1980-09-16 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5752162A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170082453A (en) | 2015-12-07 | 2017-07-14 | 산요 세이코 가부시키가이샤 | Device for evaluating vascular elasticity |
-
1980
- 1980-09-16 JP JP12709780A patent/JPS5752162A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170082453A (en) | 2015-12-07 | 2017-07-14 | 산요 세이코 가부시키가이샤 | Device for evaluating vascular elasticity |
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