JPS5493366A - Bipolar type transistor - Google Patents
Bipolar type transistorInfo
- Publication number
- JPS5493366A JPS5493366A JP15885877A JP15885877A JPS5493366A JP S5493366 A JPS5493366 A JP S5493366A JP 15885877 A JP15885877 A JP 15885877A JP 15885877 A JP15885877 A JP 15885877A JP S5493366 A JPS5493366 A JP S5493366A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- region
- substrate
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 abstract 5
- 238000009413 insulation Methods 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 230000003071 parasitic effect Effects 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1004—Base region of bipolar transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To establish the bipolar transistor small in parasitic capacitance and small in size, by providing the layer of opposite conduction type as the substrate, between the base and collector region and the semiconductor substrate being the emitter. CONSTITUTION:The insulation layer 3 is coated on the P type semiconductor substrate 6, window is opened, and the thickness of the substrate 6 in the window 2 is made thin with etching and the thinned part is implanted with the N<+> type region. Next, the N type layer 7 is grown on the entire surface, it is covered with the insulation layer 1, window is again opened, the P type region 5 is formed by diffusion in the layer 7, a part of it is covered with the insulation layer, forming the N<+> region 6 in the region 5 by diffusion. After that, the conductive layers 10 and 11 leading on the layer 1 while contacting with the regions 8 and 10 are coated, constituting the bipolar type transistor Q taking the regions 5,6 and the substrate 6 as base, collector and emitter respectively. Thus, since the N type layer 7 is placed on the transistor, the electric leading out is made easy and the parasitic capacitance can be reduced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52158858A JPS5940298B2 (en) | 1977-12-30 | 1977-12-30 | bipolar transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52158858A JPS5940298B2 (en) | 1977-12-30 | 1977-12-30 | bipolar transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5493366A true JPS5493366A (en) | 1979-07-24 |
JPS5940298B2 JPS5940298B2 (en) | 1984-09-29 |
Family
ID=15680930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52158858A Expired JPS5940298B2 (en) | 1977-12-30 | 1977-12-30 | bipolar transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5940298B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55118665A (en) * | 1979-03-06 | 1980-09-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device |
JPS55130138A (en) * | 1979-03-29 | 1980-10-08 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device and its manufacturing method |
JPS55151350A (en) * | 1979-05-16 | 1980-11-25 | Mitsubishi Electric Corp | Semiconductor device and fabricating method of the same |
JPS5654064A (en) * | 1979-10-08 | 1981-05-13 | Mitsubishi Electric Corp | Semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5029184A (en) * | 1973-07-17 | 1975-03-25 | ||
JPS52119874A (en) * | 1976-04-02 | 1977-10-07 | Hitachi Ltd | Semi-conductor device |
-
1977
- 1977-12-30 JP JP52158858A patent/JPS5940298B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5029184A (en) * | 1973-07-17 | 1975-03-25 | ||
JPS52119874A (en) * | 1976-04-02 | 1977-10-07 | Hitachi Ltd | Semi-conductor device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55118665A (en) * | 1979-03-06 | 1980-09-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device |
JPS6346582B2 (en) * | 1979-03-06 | 1988-09-16 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai | |
JPS55130138A (en) * | 1979-03-29 | 1980-10-08 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device and its manufacturing method |
JPS55151350A (en) * | 1979-05-16 | 1980-11-25 | Mitsubishi Electric Corp | Semiconductor device and fabricating method of the same |
JPS5654064A (en) * | 1979-10-08 | 1981-05-13 | Mitsubishi Electric Corp | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5940298B2 (en) | 1984-09-29 |
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