JPS57115864A - Compound semiconductor device - Google Patents
Compound semiconductor deviceInfo
- Publication number
- JPS57115864A JPS57115864A JP203881A JP203881A JPS57115864A JP S57115864 A JPS57115864 A JP S57115864A JP 203881 A JP203881 A JP 203881A JP 203881 A JP203881 A JP 203881A JP S57115864 A JPS57115864 A JP S57115864A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- metal
- type inp
- ohmic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 150000001875 compounds Chemical class 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
- 229910052751 metal Inorganic materials 0.000 abstract 4
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 229910052804 chromium Inorganic materials 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910052697 platinum Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052709 silver Inorganic materials 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052719 titanium Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/452—Ohmic electrodes on AIII-BV compounds
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP203881A JPS57115864A (en) | 1981-01-12 | 1981-01-12 | Compound semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP203881A JPS57115864A (en) | 1981-01-12 | 1981-01-12 | Compound semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57115864A true JPS57115864A (en) | 1982-07-19 |
JPH0224030B2 JPH0224030B2 (ja) | 1990-05-28 |
Family
ID=11518147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP203881A Granted JPS57115864A (en) | 1981-01-12 | 1981-01-12 | Compound semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57115864A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5941867A (ja) * | 1982-03-31 | 1984-03-08 | Anritsu Corp | 貫通穴を有するセラミックス部品の製造方法 |
JPS59119776A (ja) * | 1982-12-27 | 1984-07-11 | Fujitsu Ltd | 発光半導体装置 |
JPS59220966A (ja) * | 1983-05-31 | 1984-12-12 | Toshiba Corp | 半導体装置 |
JPH03103840U (ja) * | 1990-02-13 | 1991-10-29 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497628A (ja) * | 1972-05-25 | 1974-01-23 | ||
JPS5348670A (en) * | 1976-10-15 | 1978-05-02 | Toshiba Corp | Electrode structure of semiconductor element |
-
1981
- 1981-01-12 JP JP203881A patent/JPS57115864A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497628A (ja) * | 1972-05-25 | 1974-01-23 | ||
JPS5348670A (en) * | 1976-10-15 | 1978-05-02 | Toshiba Corp | Electrode structure of semiconductor element |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5941867A (ja) * | 1982-03-31 | 1984-03-08 | Anritsu Corp | 貫通穴を有するセラミックス部品の製造方法 |
JPS59119776A (ja) * | 1982-12-27 | 1984-07-11 | Fujitsu Ltd | 発光半導体装置 |
JPS59220966A (ja) * | 1983-05-31 | 1984-12-12 | Toshiba Corp | 半導体装置 |
JPH03103840U (ja) * | 1990-02-13 | 1991-10-29 |
Also Published As
Publication number | Publication date |
---|---|
JPH0224030B2 (ja) | 1990-05-28 |
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