JPS5698835A - Method of recognition of semiconductor pellet - Google Patents
Method of recognition of semiconductor pelletInfo
- Publication number
- JPS5698835A JPS5698835A JP132280A JP132280A JPS5698835A JP S5698835 A JPS5698835 A JP S5698835A JP 132280 A JP132280 A JP 132280A JP 132280 A JP132280 A JP 132280A JP S5698835 A JPS5698835 A JP S5698835A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- detection
- external shape
- corners
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000008188 pellet Substances 0.000 title abstract 7
- 239000004065 semiconductor Substances 0.000 title 1
- 238000001514 detection method Methods 0.000 abstract 6
- 230000007547 defect Effects 0.000 abstract 4
- 230000009191 jumping Effects 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP132280A JPS5698835A (en) | 1980-01-11 | 1980-01-11 | Method of recognition of semiconductor pellet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP132280A JPS5698835A (en) | 1980-01-11 | 1980-01-11 | Method of recognition of semiconductor pellet |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5698835A true JPS5698835A (en) | 1981-08-08 |
JPS634348B2 JPS634348B2 (enrdf_load_stackoverflow) | 1988-01-28 |
Family
ID=11498250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP132280A Granted JPS5698835A (en) | 1980-01-11 | 1980-01-11 | Method of recognition of semiconductor pellet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5698835A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59211239A (ja) * | 1983-05-17 | 1984-11-30 | Nec Corp | 半導体ペレツト配列機 |
JPS6085520A (ja) * | 1983-10-17 | 1985-05-15 | Hitachi Ltd | パタ−ン検査方法 |
US5881888A (en) * | 1995-10-23 | 1999-03-16 | Kabushiki Kaisha Shinkawa | Wafer die pick-up method |
US6628818B1 (en) * | 1999-03-31 | 2003-09-30 | Nec Machinery Corporation | Method for recognizing images of fine work pieces and pickup apparatus employing the method |
-
1980
- 1980-01-11 JP JP132280A patent/JPS5698835A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59211239A (ja) * | 1983-05-17 | 1984-11-30 | Nec Corp | 半導体ペレツト配列機 |
JPS6085520A (ja) * | 1983-10-17 | 1985-05-15 | Hitachi Ltd | パタ−ン検査方法 |
US5881888A (en) * | 1995-10-23 | 1999-03-16 | Kabushiki Kaisha Shinkawa | Wafer die pick-up method |
US6628818B1 (en) * | 1999-03-31 | 2003-09-30 | Nec Machinery Corporation | Method for recognizing images of fine work pieces and pickup apparatus employing the method |
Also Published As
Publication number | Publication date |
---|---|
JPS634348B2 (enrdf_load_stackoverflow) | 1988-01-28 |
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