JPS5513941A - Semiconductor wafer with traget for prove - Google Patents
Semiconductor wafer with traget for proveInfo
- Publication number
- JPS5513941A JPS5513941A JP8690078A JP8690078A JPS5513941A JP S5513941 A JPS5513941 A JP S5513941A JP 8690078 A JP8690078 A JP 8690078A JP 8690078 A JP8690078 A JP 8690078A JP S5513941 A JPS5513941 A JP S5513941A
- Authority
- JP
- Japan
- Prior art keywords
- chips
- semiconductor wafer
- prove
- wafer
- traget
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform a positioning for the proving accurately by providing a substantially crossed target for alignment in a chip on the circumference to be dumped of the chips sectioned by a scribe line of the semiconductor wafer.
CONSTITUTION: A scribe line 5 is given transversely and vertically to a semiconductor wafer 1 and the quality of the chips is determined by proving each of the chips surrounded with these lines. In this case, if the wafer 1 mounted on the stand may be inclined, a prove would not make an accurate contact with the face of a velet 4. In order to overcome this defect, a crossed target 2 is provided in the chip 4 on the circumferential protion to be dumped without utilizing as an IC element of the chips 4, to perform the positioning of X - Y direction for the wafer 1 accurately.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8690078A JPS5513941A (en) | 1978-07-17 | 1978-07-17 | Semiconductor wafer with traget for prove |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8690078A JPS5513941A (en) | 1978-07-17 | 1978-07-17 | Semiconductor wafer with traget for prove |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5513941A true JPS5513941A (en) | 1980-01-31 |
Family
ID=13899700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8690078A Pending JPS5513941A (en) | 1978-07-17 | 1978-07-17 | Semiconductor wafer with traget for prove |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5513941A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145326A (en) * | 1980-12-29 | 1982-09-08 | Censor Patent Versuch | Method and device for forming pattern on wafer by photosensing semiconductor wafer |
JPS57204957U (en) * | 1981-06-25 | 1982-12-27 | ||
JPH01242613A (en) * | 1988-03-23 | 1989-09-27 | Nippon Kayaku Co Ltd | Urethane (meth)acrylate mixture and resin composition and coating agent for optical fiber using this mixture |
-
1978
- 1978-07-17 JP JP8690078A patent/JPS5513941A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145326A (en) * | 1980-12-29 | 1982-09-08 | Censor Patent Versuch | Method and device for forming pattern on wafer by photosensing semiconductor wafer |
JPS57204957U (en) * | 1981-06-25 | 1982-12-27 | ||
JPS633321Y2 (en) * | 1981-06-25 | 1988-01-27 | ||
JPH01242613A (en) * | 1988-03-23 | 1989-09-27 | Nippon Kayaku Co Ltd | Urethane (meth)acrylate mixture and resin composition and coating agent for optical fiber using this mixture |
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