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Fujitsu Ltd
Original Assignee
Fujitsu Ltd
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Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP15470475ApriorityCriticalpatent/JPS5279678A/en
Publication of JPS5279678ApublicationCriticalpatent/JPS5279678A/en
PURPOSE: To repair the defective parts of elements on the same substrate by preparing a mask for one element, and using negative photoresist for photoresist mask flaws and positive photoresist for metal wiring disconnection.
COPYRIGHT: (C)1977,JPO&Japio
JP15470475A1975-12-261975-12-26Repairing method for semiconductor memory elements
PendingJPS5279678A
(en)