JPS5366174A - Finding method for defective part of semiconductor unit - Google Patents
Finding method for defective part of semiconductor unitInfo
- Publication number
- JPS5366174A JPS5366174A JP14113976A JP14113976A JPS5366174A JP S5366174 A JPS5366174 A JP S5366174A JP 14113976 A JP14113976 A JP 14113976A JP 14113976 A JP14113976 A JP 14113976A JP S5366174 A JPS5366174 A JP S5366174A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor unit
- defective part
- finding method
- defective parts
- exposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To detect defective parts by exposing the Si part of a semiconductor unit and applying the reverse voltage gradually in a dark room to made the defective parts luminous.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14113976A JPS5366174A (en) | 1976-11-26 | 1976-11-26 | Finding method for defective part of semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14113976A JPS5366174A (en) | 1976-11-26 | 1976-11-26 | Finding method for defective part of semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5366174A true JPS5366174A (en) | 1978-06-13 |
Family
ID=15285067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14113976A Pending JPS5366174A (en) | 1976-11-26 | 1976-11-26 | Finding method for defective part of semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5366174A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01120031A (en) * | 1987-11-02 | 1989-05-12 | Shin Etsu Handotai Co Ltd | Detection of abnormal layer of epitaxial wafer |
-
1976
- 1976-11-26 JP JP14113976A patent/JPS5366174A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01120031A (en) * | 1987-11-02 | 1989-05-12 | Shin Etsu Handotai Co Ltd | Detection of abnormal layer of epitaxial wafer |
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