JPS5434768A - Manufacture of semiconductor element - Google Patents

Manufacture of semiconductor element

Info

Publication number
JPS5434768A
JPS5434768A JP10048477A JP10048477A JPS5434768A JP S5434768 A JPS5434768 A JP S5434768A JP 10048477 A JP10048477 A JP 10048477A JP 10048477 A JP10048477 A JP 10048477A JP S5434768 A JPS5434768 A JP S5434768A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor element
characterstics
breakdown
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10048477A
Other languages
Japanese (ja)
Inventor
Ryoichi Ono
Keizo Inaba
Shuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10048477A priority Critical patent/JPS5434768A/en
Publication of JPS5434768A publication Critical patent/JPS5434768A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To check element characterstics in a non-breakdown way without any need of a dummy wafer, by inspecting whether a crystal defect exists or not after covering an element part formed in a semiconductor wafer with a protective film and etching an exposed scribe region.
COPYRIGHT: (C)1979,JPO&Japio
JP10048477A 1977-08-24 1977-08-24 Manufacture of semiconductor element Pending JPS5434768A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10048477A JPS5434768A (en) 1977-08-24 1977-08-24 Manufacture of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10048477A JPS5434768A (en) 1977-08-24 1977-08-24 Manufacture of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5434768A true JPS5434768A (en) 1979-03-14

Family

ID=14275192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10048477A Pending JPS5434768A (en) 1977-08-24 1977-08-24 Manufacture of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5434768A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246891A (en) * 1990-05-07 1993-09-21 Nikon Corporation Light-weight optical glass of fluoro-phosphate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4848081A (en) * 1971-10-21 1973-07-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4848081A (en) * 1971-10-21 1973-07-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246891A (en) * 1990-05-07 1993-09-21 Nikon Corporation Light-weight optical glass of fluoro-phosphate

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