JPS5434768A - Manufacture of semiconductor element - Google Patents
Manufacture of semiconductor elementInfo
- Publication number
- JPS5434768A JPS5434768A JP10048477A JP10048477A JPS5434768A JP S5434768 A JPS5434768 A JP S5434768A JP 10048477 A JP10048477 A JP 10048477A JP 10048477 A JP10048477 A JP 10048477A JP S5434768 A JPS5434768 A JP S5434768A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor element
- characterstics
- breakdown
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To check element characterstics in a non-breakdown way without any need of a dummy wafer, by inspecting whether a crystal defect exists or not after covering an element part formed in a semiconductor wafer with a protective film and etching an exposed scribe region.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10048477A JPS5434768A (en) | 1977-08-24 | 1977-08-24 | Manufacture of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10048477A JPS5434768A (en) | 1977-08-24 | 1977-08-24 | Manufacture of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5434768A true JPS5434768A (en) | 1979-03-14 |
Family
ID=14275192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10048477A Pending JPS5434768A (en) | 1977-08-24 | 1977-08-24 | Manufacture of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5434768A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246891A (en) * | 1990-05-07 | 1993-09-21 | Nikon Corporation | Light-weight optical glass of fluoro-phosphate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4848081A (en) * | 1971-10-21 | 1973-07-07 |
-
1977
- 1977-08-24 JP JP10048477A patent/JPS5434768A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4848081A (en) * | 1971-10-21 | 1973-07-07 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246891A (en) * | 1990-05-07 | 1993-09-21 | Nikon Corporation | Light-weight optical glass of fluoro-phosphate |
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