JPS4848081A - - Google Patents
Info
- Publication number
- JPS4848081A JPS4848081A JP8359571A JP8359571A JPS4848081A JP S4848081 A JPS4848081 A JP S4848081A JP 8359571 A JP8359571 A JP 8359571A JP 8359571 A JP8359571 A JP 8359571A JP S4848081 A JPS4848081 A JP S4848081A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8359571A JPS4848081A (en) | 1971-10-21 | 1971-10-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8359571A JPS4848081A (en) | 1971-10-21 | 1971-10-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4848081A true JPS4848081A (en) | 1973-07-07 |
Family
ID=13806827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8359571A Pending JPS4848081A (en) | 1971-10-21 | 1971-10-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4848081A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5434768A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Manufacture of semiconductor element |
JPS54121676A (en) * | 1978-03-15 | 1979-09-20 | Hitachi Ltd | Semiconductor surface etching processor |
JPS6035520A (en) * | 1984-04-25 | 1985-02-23 | Hitachi Ltd | Device for semiconductor surface etching process |
US5436923A (en) * | 1993-04-28 | 1995-07-25 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor laser including light reflecting layer |
-
1971
- 1971-10-21 JP JP8359571A patent/JPS4848081A/ja active Pending
Non-Patent Citations (1)
Title |
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THE REVIEW OF SCIENTIFIC INSTRUMENTS#V41#N5#M5=1970 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5434768A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Manufacture of semiconductor element |
JPS54121676A (en) * | 1978-03-15 | 1979-09-20 | Hitachi Ltd | Semiconductor surface etching processor |
JPS6035520A (en) * | 1984-04-25 | 1985-02-23 | Hitachi Ltd | Device for semiconductor surface etching process |
US5436923A (en) * | 1993-04-28 | 1995-07-25 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor laser including light reflecting layer |