JPS51126192A - An inspection apparatus to inspect inside surface of a test piese - Google Patents
An inspection apparatus to inspect inside surface of a test pieseInfo
- Publication number
- JPS51126192A JPS51126192A JP5113175A JP5113175A JPS51126192A JP S51126192 A JPS51126192 A JP S51126192A JP 5113175 A JP5113175 A JP 5113175A JP 5113175 A JP5113175 A JP 5113175A JP S51126192 A JPS51126192 A JP S51126192A
- Authority
- JP
- Japan
- Prior art keywords
- piese
- test
- inspection apparatus
- inside surface
- inspect inside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
Abstract
PURPOSE: An apparatus which detects microscopic flows, scratches and uneveness of the surface being checked with high reliability and preciseness by transmitting laser beam to the spot on the surface being tested.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5113175A JPS51126192A (en) | 1975-04-25 | 1975-04-25 | An inspection apparatus to inspect inside surface of a test piese |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5113175A JPS51126192A (en) | 1975-04-25 | 1975-04-25 | An inspection apparatus to inspect inside surface of a test piese |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51126192A true JPS51126192A (en) | 1976-11-04 |
JPS5310475B2 JPS5310475B2 (en) | 1978-04-13 |
Family
ID=12878247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5113175A Granted JPS51126192A (en) | 1975-04-25 | 1975-04-25 | An inspection apparatus to inspect inside surface of a test piese |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51126192A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518903A (en) * | 1978-07-26 | 1980-02-09 | Hitachi Ltd | Inspector for tubular body |
JPS5643538A (en) * | 1979-09-18 | 1981-04-22 | Mitsubishi Heavy Ind Ltd | Inner surface visual inspection device of heat transfer tube of heat exchanger or the like |
WO2007060873A1 (en) * | 2005-11-24 | 2007-05-31 | Kirin Techno-System Corporation | Surface examination device |
JP2014190885A (en) * | 2013-03-28 | 2014-10-06 | Kubota Corp | Inner surface inspection device and reference piece |
-
1975
- 1975-04-25 JP JP5113175A patent/JPS51126192A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518903A (en) * | 1978-07-26 | 1980-02-09 | Hitachi Ltd | Inspector for tubular body |
JPS6250773B2 (en) * | 1978-07-26 | 1987-10-27 | Hitachi Ltd | |
JPS5643538A (en) * | 1979-09-18 | 1981-04-22 | Mitsubishi Heavy Ind Ltd | Inner surface visual inspection device of heat transfer tube of heat exchanger or the like |
WO2007060873A1 (en) * | 2005-11-24 | 2007-05-31 | Kirin Techno-System Corporation | Surface examination device |
JP2014190885A (en) * | 2013-03-28 | 2014-10-06 | Kubota Corp | Inner surface inspection device and reference piece |
Also Published As
Publication number | Publication date |
---|---|
JPS5310475B2 (en) | 1978-04-13 |
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