JPS51126192A - An inspection apparatus to inspect inside surface of a test piese - Google Patents

An inspection apparatus to inspect inside surface of a test piese

Info

Publication number
JPS51126192A
JPS51126192A JP5113175A JP5113175A JPS51126192A JP S51126192 A JPS51126192 A JP S51126192A JP 5113175 A JP5113175 A JP 5113175A JP 5113175 A JP5113175 A JP 5113175A JP S51126192 A JPS51126192 A JP S51126192A
Authority
JP
Japan
Prior art keywords
piese
test
inspection apparatus
inside surface
inspect inside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5113175A
Other languages
Japanese (ja)
Other versions
JPS5310475B2 (en
Inventor
Koji Nishida
Osamu Miyake
Taneichi Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP5113175A priority Critical patent/JPS51126192A/en
Publication of JPS51126192A publication Critical patent/JPS51126192A/en
Publication of JPS5310475B2 publication Critical patent/JPS5310475B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)

Abstract

PURPOSE: An apparatus which detects microscopic flows, scratches and uneveness of the surface being checked with high reliability and preciseness by transmitting laser beam to the spot on the surface being tested.
COPYRIGHT: (C)1976,JPO&Japio
JP5113175A 1975-04-25 1975-04-25 An inspection apparatus to inspect inside surface of a test piese Granted JPS51126192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5113175A JPS51126192A (en) 1975-04-25 1975-04-25 An inspection apparatus to inspect inside surface of a test piese

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5113175A JPS51126192A (en) 1975-04-25 1975-04-25 An inspection apparatus to inspect inside surface of a test piese

Publications (2)

Publication Number Publication Date
JPS51126192A true JPS51126192A (en) 1976-11-04
JPS5310475B2 JPS5310475B2 (en) 1978-04-13

Family

ID=12878247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5113175A Granted JPS51126192A (en) 1975-04-25 1975-04-25 An inspection apparatus to inspect inside surface of a test piese

Country Status (1)

Country Link
JP (1) JPS51126192A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518903A (en) * 1978-07-26 1980-02-09 Hitachi Ltd Inspector for tubular body
JPS5643538A (en) * 1979-09-18 1981-04-22 Mitsubishi Heavy Ind Ltd Inner surface visual inspection device of heat transfer tube of heat exchanger or the like
WO2007060873A1 (en) * 2005-11-24 2007-05-31 Kirin Techno-System Corporation Surface examination device
JP2014190885A (en) * 2013-03-28 2014-10-06 Kubota Corp Inner surface inspection device and reference piece

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518903A (en) * 1978-07-26 1980-02-09 Hitachi Ltd Inspector for tubular body
JPS6250773B2 (en) * 1978-07-26 1987-10-27 Hitachi Ltd
JPS5643538A (en) * 1979-09-18 1981-04-22 Mitsubishi Heavy Ind Ltd Inner surface visual inspection device of heat transfer tube of heat exchanger or the like
WO2007060873A1 (en) * 2005-11-24 2007-05-31 Kirin Techno-System Corporation Surface examination device
JP2014190885A (en) * 2013-03-28 2014-10-06 Kubota Corp Inner surface inspection device and reference piece

Also Published As

Publication number Publication date
JPS5310475B2 (en) 1978-04-13

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