JPS52149069A - Method and device for detecting zone in which members constituting semiconductor are distributed - Google Patents

Method and device for detecting zone in which members constituting semiconductor are distributed

Info

Publication number
JPS52149069A
JPS52149069A JP6560776A JP6560776A JPS52149069A JP S52149069 A JPS52149069 A JP S52149069A JP 6560776 A JP6560776 A JP 6560776A JP 6560776 A JP6560776 A JP 6560776A JP S52149069 A JPS52149069 A JP S52149069A
Authority
JP
Japan
Prior art keywords
distributed
members constituting
detecting zone
constituting semiconductor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6560776A
Other languages
Japanese (ja)
Other versions
JPS5516534B2 (en
Inventor
Nobushi Suzuki
Tomio Kashihara
Tatsu Yasue
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP6560776A priority Critical patent/JPS5516534B2/ja
Priority claimed from US05/804,441 external-priority patent/US4200393A/en
Publication of JPS52149069A publication Critical patent/JPS52149069A/en
Publication of JPS5516534B2 publication Critical patent/JPS5516534B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To inspect the zone in which the members constituting a semiconductor are distributed, locate the members and judge whether or not they are acceptable on the basis of the information obained by scanning the entire optical image formed on a photo alloy.
COPYRIGHT: (C)1977,JPO&Japio
JP6560776A 1976-06-07 1976-06-07 Expired JPS5516534B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6560776A JPS5516534B2 (en) 1976-06-07 1976-06-07

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6560776A JPS5516534B2 (en) 1976-06-07 1976-06-07
US05/804,441 US4200393A (en) 1976-06-07 1977-06-07 Method of positioning a semiconductor member by examining it and a die bonding apparatus using the same

Publications (2)

Publication Number Publication Date
JPS52149069A true JPS52149069A (en) 1977-12-10
JPS5516534B2 JPS5516534B2 (en) 1980-05-02

Family

ID=13291860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6560776A Expired JPS5516534B2 (en) 1976-06-07 1976-06-07

Country Status (1)

Country Link
JP (1) JPS5516534B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158874A (en) * 1978-06-06 1979-12-15 Matsushita Electronics Corp Dies bonding unit
JPS58145913A (en) * 1982-02-25 1983-08-31 Nec Corp Collet positioning optical system
JPS59189240U (en) * 1983-06-03 1984-12-15
JPH01140633A (en) * 1987-11-27 1989-06-01 Tokyo Sokuhan Kk Chip position detecting equipment and chip feeding method in die-bonder

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838978A (en) * 1971-09-20 1973-06-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838978A (en) * 1971-09-20 1973-06-08

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158874A (en) * 1978-06-06 1979-12-15 Matsushita Electronics Corp Dies bonding unit
JPS5746651B2 (en) * 1978-06-06 1982-10-05
JPS58145913A (en) * 1982-02-25 1983-08-31 Nec Corp Collet positioning optical system
JPS59189240U (en) * 1983-06-03 1984-12-15
JPH0526740Y2 (en) * 1983-06-03 1993-07-07
JPH01140633A (en) * 1987-11-27 1989-06-01 Tokyo Sokuhan Kk Chip position detecting equipment and chip feeding method in die-bonder

Also Published As

Publication number Publication date
JPS5516534B2 (en) 1980-05-02

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