JPS5691464A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5691464A
JPS5691464A JP16902979A JP16902979A JPS5691464A JP S5691464 A JPS5691464 A JP S5691464A JP 16902979 A JP16902979 A JP 16902979A JP 16902979 A JP16902979 A JP 16902979A JP S5691464 A JPS5691464 A JP S5691464A
Authority
JP
Japan
Prior art keywords
silicon
membrane
oxide membrane
electrode
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16902979A
Other languages
Japanese (ja)
Other versions
JPS5828750B2 (en
Inventor
Kunihiko Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP54169029A priority Critical patent/JPS5828750B2/en
Publication of JPS5691464A publication Critical patent/JPS5691464A/en
Publication of JPS5828750B2 publication Critical patent/JPS5828750B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B20/00Read-only memory [ROM] devices
    • H10B20/20Programmable ROM [PROM] devices comprising field-effect components

Landscapes

  • Static Random-Access Memory (AREA)
  • Read Only Memory (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE:To obtain a change-over element which can be converted from nonconducted condition to conducted condition by impression of voltage and also easily turned into higher density, by composing it of an amorphous or a noncrystal silicon layer, an insulation membrane formed on this surface and an electrode layer which is formed on this insulation membrane. CONSTITUTION:This is composed of a silicon substrate 1, a silicon dioxide membrane 2, an amorphous silicon layer 3, a silicon oxide membrane 4 which is formed by oxidation of a surface layer of the silicon layer 3, and an electrode 5 consisting of Al formed on the oxide membrane 4. By selecting thickness of the oxide membrane 4 to a required value by taking advantage of the characteristic that an insulation proof stress of a silicon oxide membrane obtained from oxidation of an amorphous silicon is remarkably lower than an insulation proof stress of a single-crystal silicon oxide membrane, and by impressing voltage between the electrode 5 and the silicon layer 3, a dielectric breakdown is caused to the oxide membrane 4 to provide conducted condition between the electrode 5 and the silicon layer 3.
JP54169029A 1979-12-25 1979-12-25 semiconductor equipment Expired JPS5828750B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54169029A JPS5828750B2 (en) 1979-12-25 1979-12-25 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54169029A JPS5828750B2 (en) 1979-12-25 1979-12-25 semiconductor equipment

Publications (2)

Publication Number Publication Date
JPS5691464A true JPS5691464A (en) 1981-07-24
JPS5828750B2 JPS5828750B2 (en) 1983-06-17

Family

ID=15878994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54169029A Expired JPS5828750B2 (en) 1979-12-25 1979-12-25 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS5828750B2 (en)

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57103348A (en) * 1980-12-18 1982-06-26 Toshiba Corp Semiconductor memory device
US5079746A (en) * 1988-02-08 1992-01-07 Fujitsu Limited Semiconductor memory circuit
US6797145B2 (en) * 1999-08-27 2004-09-28 Lex Kosowsky Current carrying structure using voltage switchable dielectric material
US7695644B2 (en) 1999-08-27 2010-04-13 Shocking Technologies, Inc. Device applications for voltage switchable dielectric material having high aspect ratio particles
US7768014B2 (en) 2005-01-31 2010-08-03 Semiconductor Energy Laboratory Co., Ltd. Memory device and manufacturing method thereof
US7793236B2 (en) 2007-06-13 2010-09-07 Shocking Technologies, Inc. System and method for including protective voltage switchable dielectric material in the design or simulation of substrate devices
US7825491B2 (en) 2005-11-22 2010-11-02 Shocking Technologies, Inc. Light-emitting device using voltage switchable dielectric material
US7872251B2 (en) 2006-09-24 2011-01-18 Shocking Technologies, Inc. Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same
US7923844B2 (en) 2005-11-22 2011-04-12 Shocking Technologies, Inc. Semiconductor devices including voltage switchable materials for over-voltage protection
US7968015B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Light-emitting diode device for voltage switchable dielectric material having high aspect ratio particles
JP2011527065A (en) * 2008-06-30 2011-10-20 アレグロ・マイクロシステムズ・インコーポレーテッド Nonvolatile and programmable memory cells and memory arrays
US8203421B2 (en) 2008-04-14 2012-06-19 Shocking Technologies, Inc. Substrate device or package using embedded layer of voltage switchable dielectric material in a vertical switching configuration
US8206614B2 (en) 2008-01-18 2012-06-26 Shocking Technologies, Inc. Voltage switchable dielectric material having bonded particle constituents
US8272123B2 (en) 2009-01-27 2012-09-25 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US8362871B2 (en) 2008-11-05 2013-01-29 Shocking Technologies, Inc. Geometric and electric field considerations for including transient protective material in substrate devices
US8399773B2 (en) 2009-01-27 2013-03-19 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US8968606B2 (en) 2009-03-26 2015-03-03 Littelfuse, Inc. Components having voltage switchable dielectric materials
US9053844B2 (en) 2009-09-09 2015-06-09 Littelfuse, Inc. Geometric configuration or alignment of protective material in a gap structure for electrical devices
US9082622B2 (en) 2010-02-26 2015-07-14 Littelfuse, Inc. Circuit elements comprising ferroic materials
US9208930B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductive core shelled particles
US9208931B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductor-on-conductor core shelled particles
US9224728B2 (en) 2010-02-26 2015-12-29 Littelfuse, Inc. Embedded protection against spurious electrical events
US9226391B2 (en) 2009-01-27 2015-12-29 Littelfuse, Inc. Substrates having voltage switchable dielectric materials
US9320135B2 (en) 2010-02-26 2016-04-19 Littelfuse, Inc. Electric discharge protection for surface mounted and embedded components

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4749162B2 (en) * 2005-01-31 2011-08-17 株式会社半導体エネルギー研究所 Semiconductor device

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH049388B2 (en) * 1980-12-18 1992-02-20
JPS57103348A (en) * 1980-12-18 1982-06-26 Toshiba Corp Semiconductor memory device
US5079746A (en) * 1988-02-08 1992-01-07 Fujitsu Limited Semiconductor memory circuit
US6797145B2 (en) * 1999-08-27 2004-09-28 Lex Kosowsky Current carrying structure using voltage switchable dielectric material
US7695644B2 (en) 1999-08-27 2010-04-13 Shocking Technologies, Inc. Device applications for voltage switchable dielectric material having high aspect ratio particles
US9144151B2 (en) 1999-08-27 2015-09-22 Littelfuse, Inc. Current-carrying structures fabricated using voltage switchable dielectric materials
US7768014B2 (en) 2005-01-31 2010-08-03 Semiconductor Energy Laboratory Co., Ltd. Memory device and manufacturing method thereof
US8889490B2 (en) 2005-01-31 2014-11-18 Semiconductor Energy Laboratory Co., Ltd. Memory device and manufacturing method thereof
US8310064B2 (en) 2005-11-22 2012-11-13 Shocking Technologies, Inc. Semiconductor devices including voltage switchable materials for over-voltage protection
US7825491B2 (en) 2005-11-22 2010-11-02 Shocking Technologies, Inc. Light-emitting device using voltage switchable dielectric material
US7923844B2 (en) 2005-11-22 2011-04-12 Shocking Technologies, Inc. Semiconductor devices including voltage switchable materials for over-voltage protection
US7968014B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Device applications for voltage switchable dielectric material having high aspect ratio particles
US7968010B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Method for electroplating a substrate
US7981325B2 (en) 2006-07-29 2011-07-19 Shocking Technologies, Inc. Electronic device for voltage switchable dielectric material having high aspect ratio particles
US7968015B2 (en) 2006-07-29 2011-06-28 Shocking Technologies, Inc. Light-emitting diode device for voltage switchable dielectric material having high aspect ratio particles
US8163595B2 (en) 2006-09-24 2012-04-24 Shocking Technologies, Inc. Formulations for voltage switchable dielectric materials having a stepped voltage response and methods for making the same
US7872251B2 (en) 2006-09-24 2011-01-18 Shocking Technologies, Inc. Formulations for voltage switchable dielectric material having a stepped voltage response and methods for making the same
US7793236B2 (en) 2007-06-13 2010-09-07 Shocking Technologies, Inc. System and method for including protective voltage switchable dielectric material in the design or simulation of substrate devices
US8206614B2 (en) 2008-01-18 2012-06-26 Shocking Technologies, Inc. Voltage switchable dielectric material having bonded particle constituents
US8203421B2 (en) 2008-04-14 2012-06-19 Shocking Technologies, Inc. Substrate device or package using embedded layer of voltage switchable dielectric material in a vertical switching configuration
JP2011527065A (en) * 2008-06-30 2011-10-20 アレグロ・マイクロシステムズ・インコーポレーテッド Nonvolatile and programmable memory cells and memory arrays
US9208930B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductive core shelled particles
US9208931B2 (en) 2008-09-30 2015-12-08 Littelfuse, Inc. Voltage switchable dielectric material containing conductor-on-conductor core shelled particles
US8362871B2 (en) 2008-11-05 2013-01-29 Shocking Technologies, Inc. Geometric and electric field considerations for including transient protective material in substrate devices
US8399773B2 (en) 2009-01-27 2013-03-19 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US8272123B2 (en) 2009-01-27 2012-09-25 Shocking Technologies, Inc. Substrates having voltage switchable dielectric materials
US9226391B2 (en) 2009-01-27 2015-12-29 Littelfuse, Inc. Substrates having voltage switchable dielectric materials
US8968606B2 (en) 2009-03-26 2015-03-03 Littelfuse, Inc. Components having voltage switchable dielectric materials
US9053844B2 (en) 2009-09-09 2015-06-09 Littelfuse, Inc. Geometric configuration or alignment of protective material in a gap structure for electrical devices
US9082622B2 (en) 2010-02-26 2015-07-14 Littelfuse, Inc. Circuit elements comprising ferroic materials
US9224728B2 (en) 2010-02-26 2015-12-29 Littelfuse, Inc. Embedded protection against spurious electrical events
US9320135B2 (en) 2010-02-26 2016-04-19 Littelfuse, Inc. Electric discharge protection for surface mounted and embedded components

Also Published As

Publication number Publication date
JPS5828750B2 (en) 1983-06-17

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