JPS5357979A - Semiconductor device and its production - Google Patents

Semiconductor device and its production

Info

Publication number
JPS5357979A
JPS5357979A JP13337176A JP13337176A JPS5357979A JP S5357979 A JPS5357979 A JP S5357979A JP 13337176 A JP13337176 A JP 13337176A JP 13337176 A JP13337176 A JP 13337176A JP S5357979 A JPS5357979 A JP S5357979A
Authority
JP
Japan
Prior art keywords
production
porous
semiconductor device
island
island regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13337176A
Other languages
Japanese (ja)
Other versions
JPS5942979B2 (en
Inventor
Kazutoshi Nagano
Kosei Kajiwara
Tatsunori Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP51133371A priority Critical patent/JPS5942979B2/en
Publication of JPS5357979A publication Critical patent/JPS5357979A/en
Publication of JPS5942979B2 publication Critical patent/JPS5942979B2/en
Expired legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To make the dielectric isolation of island perfect and prevent the production of stress in island regions by encircling the bottom and side faces of plural semiconductor island regions with porous Si or porous Si converted to an insulator and making the porous Si on the bottom surface at an even depth.
COPYRIGHT: (C)1978,JPO&Japio
JP51133371A 1976-11-06 1976-11-06 Manufacturing method of semiconductor device Expired JPS5942979B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51133371A JPS5942979B2 (en) 1976-11-06 1976-11-06 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51133371A JPS5942979B2 (en) 1976-11-06 1976-11-06 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5357979A true JPS5357979A (en) 1978-05-25
JPS5942979B2 JPS5942979B2 (en) 1984-10-18

Family

ID=15103153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51133371A Expired JPS5942979B2 (en) 1976-11-06 1976-11-06 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5942979B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515291A (en) * 1978-07-20 1980-02-02 Matsushita Electric Ind Co Ltd Manufacturing method for semiconductor device
JPS5656647A (en) * 1979-10-15 1981-05-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS56162840A (en) * 1980-05-19 1981-12-15 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830385A (en) * 1971-08-21 1973-04-21
JPS48102988A (en) * 1972-04-07 1973-12-24
JPS50120269A (en) * 1974-03-05 1975-09-20
JPS51278A (en) * 1974-06-18 1976-01-05 Matsushita Electric Ind Co Ltd HANDOTAISHUSEKIKAIROKITAINO SEIZOHOHO

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830385A (en) * 1971-08-21 1973-04-21
JPS48102988A (en) * 1972-04-07 1973-12-24
JPS50120269A (en) * 1974-03-05 1975-09-20
JPS51278A (en) * 1974-06-18 1976-01-05 Matsushita Electric Ind Co Ltd HANDOTAISHUSEKIKAIROKITAINO SEIZOHOHO

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515291A (en) * 1978-07-20 1980-02-02 Matsushita Electric Ind Co Ltd Manufacturing method for semiconductor device
JPS5656647A (en) * 1979-10-15 1981-05-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5951745B2 (en) * 1979-10-15 1984-12-15 松下電器産業株式会社 Manufacturing method of semiconductor device
JPS56162840A (en) * 1980-05-19 1981-12-15 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof
JPH0113208B2 (en) * 1980-05-19 1989-03-03 Nippon Telegraph & Telephone

Also Published As

Publication number Publication date
JPS5942979B2 (en) 1984-10-18

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