JPS5386589A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5386589A
JPS5386589A JP115277A JP115277A JPS5386589A JP S5386589 A JPS5386589 A JP S5386589A JP 115277 A JP115277 A JP 115277A JP 115277 A JP115277 A JP 115277A JP S5386589 A JPS5386589 A JP S5386589A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
layer
poly
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP115277A
Other languages
Japanese (ja)
Inventor
Masushi Taki
Haruo Kaneko
Nobuhisa Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP115277A priority Critical patent/JPS5386589A/en
Publication of JPS5386589A publication Critical patent/JPS5386589A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To increase the scale of integration of electrical connection parts of the first poly-Si layer being an under layer and the second poly-Si being an upper layer and connect surely and electrically.
COPYRIGHT: (C)1978,JPO&Japio
JP115277A 1977-01-11 1977-01-11 Production of semiconductor device Pending JPS5386589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP115277A JPS5386589A (en) 1977-01-11 1977-01-11 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP115277A JPS5386589A (en) 1977-01-11 1977-01-11 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5386589A true JPS5386589A (en) 1978-07-31

Family

ID=11493451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP115277A Pending JPS5386589A (en) 1977-01-11 1977-01-11 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5386589A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732655A (en) * 1980-08-07 1982-02-22 Nec Corp Semiconductor integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732655A (en) * 1980-08-07 1982-02-22 Nec Corp Semiconductor integrated circuit device
JPS6148779B2 (en) * 1980-08-07 1986-10-25 Nippon Electric Co

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