JPS5691459A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5691459A
JPS5691459A JP16866379A JP16866379A JPS5691459A JP S5691459 A JPS5691459 A JP S5691459A JP 16866379 A JP16866379 A JP 16866379A JP 16866379 A JP16866379 A JP 16866379A JP S5691459 A JPS5691459 A JP S5691459A
Authority
JP
Japan
Prior art keywords
resistance
dispersion
resistance element
semiconductor substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16866379A
Other languages
Japanese (ja)
Other versions
JPS6248904B2 (en
Inventor
Toru Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16866379A priority Critical patent/JPS5691459A/en
Publication of JPS5691459A publication Critical patent/JPS5691459A/en
Publication of JPS6248904B2 publication Critical patent/JPS6248904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/8605Resistors with PN junctions

Abstract

PURPOSE:To obtain a resistance element of high resistance value without increasing area of occupancy, by forming a dispersion resistance on an indented surface provided on a semiconductor substrate and then forming a resistance element of amorphous layer overlapping the dispersion layer horizontally through an insulation layer. CONSTITUTION:An indentation is provided in surface region on a semiconductor substrate 1, and a dispersion resistance element connecting surface of this indentation to the surface region is formed by a P type regions 2 and 3. Further, an ion injection resistance 8 is formed on an amorphous silicon layer 4 through an insulation layer 7 in the surface region of the semiconductor substrate 1. And one end of the aforementioned dispersion resistance element is connected to one end of the ion injection resistance 8 by aluminum 9' forming a resistance element which directly connects the dispersion resistance of the P type regions 2 and 3 to the injection resistance 8 for the amorphous silicon layer 4. At the same time, aluminum electrodes 9 are formed on both ends of this resistance element to obtain a both-end electrode of series connection resistance.
JP16866379A 1979-12-25 1979-12-25 Semiconductor device Granted JPS5691459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16866379A JPS5691459A (en) 1979-12-25 1979-12-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16866379A JPS5691459A (en) 1979-12-25 1979-12-25 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5691459A true JPS5691459A (en) 1981-07-24
JPS6248904B2 JPS6248904B2 (en) 1987-10-16

Family

ID=15872186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16866379A Granted JPS5691459A (en) 1979-12-25 1979-12-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5691459A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633288A (en) * 1982-07-16 1986-12-30 Siemens Aktiengesellschaft Light-triggerable thyristor having low light power requirement and high critical voltage rise rate
JPH04151810A (en) * 1990-10-15 1992-05-25 Matsushita Electric Works Ltd Planar transformer
US5316978A (en) * 1993-03-25 1994-05-31 Northern Telecom Limited Forming resistors for intergrated circuits

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633288A (en) * 1982-07-16 1986-12-30 Siemens Aktiengesellschaft Light-triggerable thyristor having low light power requirement and high critical voltage rise rate
JPH04151810A (en) * 1990-10-15 1992-05-25 Matsushita Electric Works Ltd Planar transformer
US5316978A (en) * 1993-03-25 1994-05-31 Northern Telecom Limited Forming resistors for intergrated circuits

Also Published As

Publication number Publication date
JPS6248904B2 (en) 1987-10-16

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