JPS5591868A - Charge transfer device - Google Patents

Charge transfer device

Info

Publication number
JPS5591868A
JPS5591868A JP8979A JP8979A JPS5591868A JP S5591868 A JPS5591868 A JP S5591868A JP 8979 A JP8979 A JP 8979A JP 8979 A JP8979 A JP 8979A JP S5591868 A JPS5591868 A JP S5591868A
Authority
JP
Japan
Prior art keywords
lead
phase
transfer electrode
electrode belonging
belonging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8979A
Other languages
Japanese (ja)
Other versions
JPS6033316B2 (en
Inventor
Hiroshi Sakai
Terunobu Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8979A priority Critical patent/JPS6033316B2/en
Publication of JPS5591868A publication Critical patent/JPS5591868A/en
Publication of JPS6033316B2 publication Critical patent/JPS6033316B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/762Charge transfer devices
    • H01L29/765Charge-coupled devices
    • H01L29/768Charge-coupled devices with field effect produced by an insulated gate
    • H01L29/76866Surface Channel CCD
    • H01L29/76891Four-Phase CCD

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To prevent a breakage in a crossover wiring part of an aluminum bus to be formed on each electrode lead, by making the lead flat. CONSTITUTION:The terminating parts of lead 26 of the transfer electrode belonging to No.1 phase (phi1), lead 25 of the transfer electrode belonging to No.3 phase (phi3), lead 29 of the transfer electrode belonging to No.2 phase (phi2) and lead 28 of the transfer electrode belonging to No.4 phase (phi4) are aligned on No.1 and common flat surface No.2. Further, No.2 and No.3 Si oxide films 27 and 37 on No.1 and No.2 common flat surface are made flat. The connection of each electrode lead layer and the bus are made by forming connection holes 31 and 32 in a zigzag form on NO.2 and No.3 Si oxide films 27 and 37 by etching and by covering this with aluminum by evaporation.
JP8979A 1978-12-29 1978-12-29 charge transfer device Expired JPS6033316B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8979A JPS6033316B2 (en) 1978-12-29 1978-12-29 charge transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8979A JPS6033316B2 (en) 1978-12-29 1978-12-29 charge transfer device

Publications (2)

Publication Number Publication Date
JPS5591868A true JPS5591868A (en) 1980-07-11
JPS6033316B2 JPS6033316B2 (en) 1985-08-02

Family

ID=11464392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8979A Expired JPS6033316B2 (en) 1978-12-29 1978-12-29 charge transfer device

Country Status (1)

Country Link
JP (1) JPS6033316B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052890Y2 (en) * 1987-04-15 1993-01-25

Also Published As

Publication number Publication date
JPS6033316B2 (en) 1985-08-02

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