JPS5591868A - Charge transfer device - Google Patents
Charge transfer deviceInfo
- Publication number
- JPS5591868A JPS5591868A JP8979A JP8979A JPS5591868A JP S5591868 A JPS5591868 A JP S5591868A JP 8979 A JP8979 A JP 8979A JP 8979 A JP8979 A JP 8979A JP S5591868 A JPS5591868 A JP S5591868A
- Authority
- JP
- Japan
- Prior art keywords
- lead
- phase
- transfer electrode
- electrode belonging
- belonging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/762—Charge transfer devices
- H01L29/765—Charge-coupled devices
- H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
- H01L29/76866—Surface Channel CCD
- H01L29/76891—Four-Phase CCD
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To prevent a breakage in a crossover wiring part of an aluminum bus to be formed on each electrode lead, by making the lead flat. CONSTITUTION:The terminating parts of lead 26 of the transfer electrode belonging to No.1 phase (phi1), lead 25 of the transfer electrode belonging to No.3 phase (phi3), lead 29 of the transfer electrode belonging to No.2 phase (phi2) and lead 28 of the transfer electrode belonging to No.4 phase (phi4) are aligned on No.1 and common flat surface No.2. Further, No.2 and No.3 Si oxide films 27 and 37 on No.1 and No.2 common flat surface are made flat. The connection of each electrode lead layer and the bus are made by forming connection holes 31 and 32 in a zigzag form on NO.2 and No.3 Si oxide films 27 and 37 by etching and by covering this with aluminum by evaporation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8979A JPS6033316B2 (en) | 1978-12-29 | 1978-12-29 | charge transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8979A JPS6033316B2 (en) | 1978-12-29 | 1978-12-29 | charge transfer device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5591868A true JPS5591868A (en) | 1980-07-11 |
JPS6033316B2 JPS6033316B2 (en) | 1985-08-02 |
Family
ID=11464392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8979A Expired JPS6033316B2 (en) | 1978-12-29 | 1978-12-29 | charge transfer device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6033316B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH052890Y2 (en) * | 1987-04-15 | 1993-01-25 |
-
1978
- 1978-12-29 JP JP8979A patent/JPS6033316B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6033316B2 (en) | 1985-08-02 |
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