JPS56158455A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS56158455A JPS56158455A JP367481A JP367481A JPS56158455A JP S56158455 A JPS56158455 A JP S56158455A JP 367481 A JP367481 A JP 367481A JP 367481 A JP367481 A JP 367481A JP S56158455 A JPS56158455 A JP S56158455A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- junctions
- constitution
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000011109 contamination Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP367481A JPS56158455A (en) | 1981-01-12 | 1981-01-12 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP367481A JPS56158455A (en) | 1981-01-12 | 1981-01-12 | Semiconductor device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1437772A Division JPS5513137B2 (en, 2012) | 1972-02-10 | 1972-02-10 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12934585A Division JPS6163041A (ja) | 1985-06-14 | 1985-06-14 | 半導体装置の製造方法 |
| JP60129346A Division JPS6163061A (ja) | 1985-06-14 | 1985-06-14 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56158455A true JPS56158455A (en) | 1981-12-07 |
| JPS6113383B2 JPS6113383B2 (en, 2012) | 1986-04-12 |
Family
ID=11563963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP367481A Granted JPS56158455A (en) | 1981-01-12 | 1981-01-12 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56158455A (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5066604A (en) * | 1989-09-08 | 1991-11-19 | Hyundai Electronics Industries Co., Ltd. | Method for manufacturing a semiconductor device utilizing a self-aligned contact process |
| JPH065570U (ja) * | 1991-12-06 | 1994-01-25 | 株式会社セラミツク藍 | 脚付きグラス |
-
1981
- 1981-01-12 JP JP367481A patent/JPS56158455A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5066604A (en) * | 1989-09-08 | 1991-11-19 | Hyundai Electronics Industries Co., Ltd. | Method for manufacturing a semiconductor device utilizing a self-aligned contact process |
| JPH065570U (ja) * | 1991-12-06 | 1994-01-25 | 株式会社セラミツク藍 | 脚付きグラス |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6113383B2 (en, 2012) | 1986-04-12 |
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