JPS56142652A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS56142652A JPS56142652A JP4593680A JP4593680A JPS56142652A JP S56142652 A JPS56142652 A JP S56142652A JP 4593680 A JP4593680 A JP 4593680A JP 4593680 A JP4593680 A JP 4593680A JP S56142652 A JPS56142652 A JP S56142652A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- layer
- wiring layer
- compound semiconductor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE:To prevent the disconnection of a multilayer wiring layer in a method of forming a wiring layer on a compound semiconductor substrate by partly anodizing an aluminum layer, thereby enabling an oblique etching of aluminum. CONSTITUTION:An aluminum layer 2 is evaporated on a compound semiconductor wafer 1, a positive photoresist 3 is formed on the part becoming a wiring layer 2', and a chemically formed layer 4 is formed by anodizing the part 2'' except the part. At this time it is so controlled that the chemical reaction may not reach the compound semiconductor layer. Thereafter, formed aluminum film 4 is removed by an etchant having higher etching speed for the formed film than the aluminum, and the residual aluminum under the film 4 is etched and removed by hot phosphoric acid, thereby obtaining an aluminum wiring layer 2 having tapered sectional structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4593680A JPS56142652A (en) | 1980-04-08 | 1980-04-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4593680A JPS56142652A (en) | 1980-04-08 | 1980-04-08 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56142652A true JPS56142652A (en) | 1981-11-07 |
Family
ID=12733149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4593680A Pending JPS56142652A (en) | 1980-04-08 | 1980-04-08 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56142652A (en) |
-
1980
- 1980-04-08 JP JP4593680A patent/JPS56142652A/en active Pending
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