JPS5587430A - Forming method of electrode pattern - Google Patents
Forming method of electrode patternInfo
- Publication number
- JPS5587430A JPS5587430A JP16087978A JP16087978A JPS5587430A JP S5587430 A JPS5587430 A JP S5587430A JP 16087978 A JP16087978 A JP 16087978A JP 16087978 A JP16087978 A JP 16087978A JP S5587430 A JPS5587430 A JP S5587430A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- regions
- type
- accurate
- colored
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16087978A JPS5587430A (en) | 1978-12-25 | 1978-12-25 | Forming method of electrode pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16087978A JPS5587430A (en) | 1978-12-25 | 1978-12-25 | Forming method of electrode pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5587430A true JPS5587430A (en) | 1980-07-02 |
Family
ID=15724337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16087978A Pending JPS5587430A (en) | 1978-12-25 | 1978-12-25 | Forming method of electrode pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5587430A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59171161A (ja) * | 1983-03-17 | 1984-09-27 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
-
1978
- 1978-12-25 JP JP16087978A patent/JPS5587430A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59171161A (ja) * | 1983-03-17 | 1984-09-27 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH025308B2 (ja) * | 1983-03-17 | 1990-02-01 | Mitsubishi Electric Corp |
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