JPS5567153A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS5567153A
JPS5567153A JP14064578A JP14064578A JPS5567153A JP S5567153 A JPS5567153 A JP S5567153A JP 14064578 A JP14064578 A JP 14064578A JP 14064578 A JP14064578 A JP 14064578A JP S5567153 A JPS5567153 A JP S5567153A
Authority
JP
Japan
Prior art keywords
layer
wiring
substrate
hole
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14064578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6143855B2 (enrdf_load_stackoverflow
Inventor
Yasunobu Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14064578A priority Critical patent/JPS5567153A/ja
Publication of JPS5567153A publication Critical patent/JPS5567153A/ja
Publication of JPS6143855B2 publication Critical patent/JPS6143855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14064578A 1978-11-15 1978-11-15 Preparation of semiconductor device Granted JPS5567153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14064578A JPS5567153A (en) 1978-11-15 1978-11-15 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14064578A JPS5567153A (en) 1978-11-15 1978-11-15 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5567153A true JPS5567153A (en) 1980-05-21
JPS6143855B2 JPS6143855B2 (enrdf_load_stackoverflow) 1986-09-30

Family

ID=15273472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14064578A Granted JPS5567153A (en) 1978-11-15 1978-11-15 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5567153A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169154A (ja) * 1983-03-16 1984-09-25 Fujitsu Ltd 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5374888A (en) * 1976-12-15 1978-07-03 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5374888A (en) * 1976-12-15 1978-07-03 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169154A (ja) * 1983-03-16 1984-09-25 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6143855B2 (enrdf_load_stackoverflow) 1986-09-30

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