JPS5518002A - Manufacturing semiconductor element - Google Patents
Manufacturing semiconductor elementInfo
- Publication number
- JPS5518002A JPS5518002A JP8990878A JP8990878A JPS5518002A JP S5518002 A JPS5518002 A JP S5518002A JP 8990878 A JP8990878 A JP 8990878A JP 8990878 A JP8990878 A JP 8990878A JP S5518002 A JPS5518002 A JP S5518002A
- Authority
- JP
- Japan
- Prior art keywords
- psg
- etching
- inverted
- size
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To reduce the size of a device by providing a PSG film on a semiconductor substrate, forming an inverted-V-shaped taper after heat treatment and etching, and laying fine wire.
CONSTITUTION: PSG 22, which is formed on an Si substrate 21, is treated in N2 at a high temperature, and the P at the surface is diffused to the outside. Therefore, since the etching speed on the surface is retarded, an inverted-V-shaped step 23 is formed when an opening 25 is made by etching. When the PSG 22 is lifted off after the evaporation of Al 24, an Al wiring layer 26 is obtained. In this method, since the fine wiring having a narrow pattern pitch can be produced, the size of the device can be reduced.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8990878A JPS5518002A (en) | 1978-07-25 | 1978-07-25 | Manufacturing semiconductor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8990878A JPS5518002A (en) | 1978-07-25 | 1978-07-25 | Manufacturing semiconductor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5518002A true JPS5518002A (en) | 1980-02-07 |
Family
ID=13983809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8990878A Pending JPS5518002A (en) | 1978-07-25 | 1978-07-25 | Manufacturing semiconductor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5518002A (en) |
-
1978
- 1978-07-25 JP JP8990878A patent/JPS5518002A/en active Pending
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