JPS54102983A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54102983A JPS54102983A JP1010678A JP1010678A JPS54102983A JP S54102983 A JPS54102983 A JP S54102983A JP 1010678 A JP1010678 A JP 1010678A JP 1010678 A JP1010678 A JP 1010678A JP S54102983 A JPS54102983 A JP S54102983A
- Authority
- JP
- Japan
- Prior art keywords
- film
- pattern
- opening
- softened
- disconnection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain the opening featuring a gentle slope of its side wall for the insulator film and thus to avoid the disconnection of the electrode wiring by forming the PSG film on the conducting film pattern and then removing it selectively and then coating the insulator film of a low etching speed on the pattern to be then etched away in the same way.
CONSTITUTION: SiO2 film 2 is coated on Si substrate 1, and then conducting film pattern 3 and 4 composed of polycrystal Si or the metal. The entire surface is heated up to be covered with the softened and flowing PSG film 5. Then film 5 is removed on pattern 3 and 4 through the photo etching method, and no trouble is caused in this case even if gap 6 is produced. After this, oxide film 7 and 8 are formed on the upper and side surfaces of pattern 3 and 4 through the heat treatment, and at the same time film 5 is softened to fill up gap 6. Then opening 10 is formed by etching to part of film 7, and thus side wall 11 of opening 10 is tilted gently. Accordingly, no disconnection is caused to the Al wiring which is provided on wall 11.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1010678A JPS54102983A (en) | 1978-01-31 | 1978-01-31 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1010678A JPS54102983A (en) | 1978-01-31 | 1978-01-31 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54102983A true JPS54102983A (en) | 1979-08-13 |
Family
ID=11741053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1010678A Pending JPS54102983A (en) | 1978-01-31 | 1978-01-31 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54102983A (en) |
-
1978
- 1978-01-31 JP JP1010678A patent/JPS54102983A/en active Pending
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