JPS5544718A - Manufacturing semiconductor device - Google Patents
Manufacturing semiconductor deviceInfo
- Publication number
- JPS5544718A JPS5544718A JP11768378A JP11768378A JPS5544718A JP S5544718 A JPS5544718 A JP S5544718A JP 11768378 A JP11768378 A JP 11768378A JP 11768378 A JP11768378 A JP 11768378A JP S5544718 A JPS5544718 A JP S5544718A
- Authority
- JP
- Japan
- Prior art keywords
- region
- film
- glass powder
- glass
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To manufacture a high-reliability device by forming a region on one side of a semiconductor substrate in a mesa shape so that the depth of the region reaches the region on the other side, depositing glass powder on the exposed surface, removing a film by plasma etching, and sintering the glass.
CONSTITUTION: A P+ region 11, an N-type region 12, and an N+ region 13 are formed in a semiconductor substrate 14, constituting a 3-layer structure. A photoresist film 15 is formed by applying organic photoresist liquid on all over the surface of the region 11 of the substate 14 and exposing it. Then a mesa shape is formed by etching until the depth reaches the region 12, with the film 15 as a mask. Then, glass powder 16 is uniformly deposited on all the exposed surface. Thereafter, the film 15 is transformed to the CO2 or H2O state by plasma-etching the surface of the substrate 14 with oxigen gas or air as reaction gas, and the film 15 is removed. Then, the glass powder 16 is sintered and a glass passivation film 17 is formed, thereby a high-reliability semiconductor device is constituted.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11768378A JPS5544718A (en) | 1978-09-25 | 1978-09-25 | Manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11768378A JPS5544718A (en) | 1978-09-25 | 1978-09-25 | Manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5544718A true JPS5544718A (en) | 1980-03-29 |
Family
ID=14717698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11768378A Pending JPS5544718A (en) | 1978-09-25 | 1978-09-25 | Manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5544718A (en) |
-
1978
- 1978-09-25 JP JP11768378A patent/JPS5544718A/en active Pending
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