JPS5533020A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5533020A JPS5533020A JP10477078A JP10477078A JPS5533020A JP S5533020 A JPS5533020 A JP S5533020A JP 10477078 A JP10477078 A JP 10477078A JP 10477078 A JP10477078 A JP 10477078A JP S5533020 A JPS5533020 A JP S5533020A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- defects
- planar
- annealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thyristors (AREA)
Abstract
PURPOSE: To prevent the characteristics of a planar semiconductor device from deteriorating due to surface potential, by annealing the semiconductor device at a temperauter of 250°C or less after irradiating the device with radiation in order to control the lifetime of the minority carriers of the device during its manufacture or after its completion.
CONSTITUTION: The planar semiconductor device is irradiated with radiation such as gamma rays in order to control the lifetime of the minority carriers of the device during its manufacture or after its completion. As a result, defects are produced in the crystal of the semiconductor device. If the device were annealed at a temperature of 300°C or more, the defects would be removed, namely, the effect of the defects would be eliminated. Therefore, the device is annealed at a temperature of 250°C or less in fact. This enables reducing the saturation current of a planar thyristor or the like without changing its turn-off time.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10477078A JPS5533020A (en) | 1978-08-28 | 1978-08-28 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10477078A JPS5533020A (en) | 1978-08-28 | 1978-08-28 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5533020A true JPS5533020A (en) | 1980-03-08 |
JPS6152976B2 JPS6152976B2 (en) | 1986-11-15 |
Family
ID=14389702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10477078A Granted JPS5533020A (en) | 1978-08-28 | 1978-08-28 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5533020A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421082A (en) * | 1977-07-18 | 1979-02-16 | Aloka Co Ltd | Ultrasonic wave diagnosing probe |
JPS59218726A (en) * | 1983-05-26 | 1984-12-10 | Mitsubishi Heavy Ind Ltd | Method for processing semiconductor |
JPH0472736A (en) * | 1990-07-13 | 1992-03-06 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPH0745167A (en) * | 1993-07-28 | 1995-02-14 | Sunx Ltd | Detecting switch |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5321572A (en) * | 1976-08-11 | 1978-02-28 | Hitachi Ltd | Production of semiconductor device |
-
1978
- 1978-08-28 JP JP10477078A patent/JPS5533020A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5321572A (en) * | 1976-08-11 | 1978-02-28 | Hitachi Ltd | Production of semiconductor device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421082A (en) * | 1977-07-18 | 1979-02-16 | Aloka Co Ltd | Ultrasonic wave diagnosing probe |
JPS5818095B2 (en) * | 1977-07-18 | 1983-04-11 | アロカ株式会社 | Ultrasonic diagnostic probe |
JPS59218726A (en) * | 1983-05-26 | 1984-12-10 | Mitsubishi Heavy Ind Ltd | Method for processing semiconductor |
JPH0472736A (en) * | 1990-07-13 | 1992-03-06 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPH0745167A (en) * | 1993-07-28 | 1995-02-14 | Sunx Ltd | Detecting switch |
Also Published As
Publication number | Publication date |
---|---|
JPS6152976B2 (en) | 1986-11-15 |
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